A merged MuGFET and planar SOI process - Andrew Marshall; C. Rinn Cleavelin; Weize Xiong; Christian Pacha; Gerhard Knoblinger; Klaus Von Armin; Thomas Schulz; Klaus Schruefer; Ken Matthews; Wolfgang Molzer; Paul Patruno; Christian Russ (2007 IEEE International SOC Conference, Tampere, Finland, November 19-21, 2007, 2007)