A merged MuGFET and planar SOI process. - Marshall, Andrew; Cleavelin, C. Rinn; Xiong, Weize; Pacha, Christian; Knoblinger, Gerhard; Armin, Klaus Von; Schulz, Thomas; Schruefer, Klaus; Matthews, Ken; Molzer, Wolfgang; Patruno, Paul; Russ, Christian (2007)