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"Robust Control for Linear Stages in Electronic Manufacturing."

Rafael Quintanilla et al. (2007)

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DOI: 10.1109/ACC.2007.4282545

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Rafael Quintanilla, John T. Wen, Murat Arcak, Joe Frankel, Mark Peeples, Mark Unrath:
Robust Control for Linear Stages in Electronic Manufacturing. ACC 2007: 1269-1274

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