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"On-axis self-calibration of precision XYθz metrology systems: An ..."

Yu Zhu et al. (2013)

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DOI: 10.1109/AIM.2013.6584237

access: closed

type: Conference or Workshop Paper

metadata version: 2020-09-02

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Yu Zhu, Chuxiong Hu, Jinchun Hu, Ming Zhang, Dengfeng Xu:
On-axis self-calibration of precision XYθz metrology systems: An approach framework. AIM 2013: 1078-1083

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