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"Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for ..."

Kambiz Nanbakhsh et al. (2020)

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DOI: 10.1109/EMBC44109.2020.9176103

access: closed

type: Conference or Workshop Paper

metadata version: 2020-12-25

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  - conf/embc/NanbakhshRSG20
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Kambiz Nanbakhsh, Riina Ritasalo, Wouter A. Serdijn, Vasiliki Giagka:
Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants. EMBC 2020: 3436-3439

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