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"A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense ..."

Arthur Campos de Oliveira et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956695

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-28

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  - conf/ieeesensors/OliveiraSGFWM19
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  - https://dblp.org/rec/conf/ieeesensors/OliveiraSGFWM19
Arthur Campos de Oliveira, T. V. P. Schut, Jarno Groenesteijn, Q. Fan, Remco J. Wiegerink, Kofi A. A. Makinwa:
A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface. IEEE SENSORS 2019: 1-4

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