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"Capacitive micromachined ultrasonic transducer for ultra-low pressure ..."

Zhikang Li et al. (2014)

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DOI: 10.1109/NEMS.2014.6908883

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

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Zhikang Li, Libo Zhao, Zhuangde Jiang, Zhiying Ye, Yulong Zhao:
Capacitive micromachined ultrasonic transducer for ultra-low pressure detection. NEMS 2014: 600-603

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