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"Ohmic Contact Characteristics of Silicon Carbide-based MEMS Devices."

Chen Wu et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451535

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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  dblp key:
  - conf/nems/WuFFKLYJ21
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  - https://dblp.org/rec/conf/nems/WuFFKLYJ21
Chen Wu, Xudong Fang, Zhihong Feng, Qiang Kang, Yuanjie Lv, Yuefei Yan, Zhuangde Jiang:
Ohmic Contact Characteristics of Silicon Carbide-based MEMS Devices. NEMS 2021: 334-338

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