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"Analysis of air damping in micromachined resonators."

Guoqiang Wu et al. (2012)

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DOI: 10.1109/NEMS.2012.6196819

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Guoqiang Wu, Dehui Xu, Bin Xiong, Yinglei Ma, Yuelin Wang, Errong Jing:
Analysis of air damping in micromachined resonators. NEMS 2012: 469-472

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