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"Chip-level-microassembly Comb-drive XYZ-microstage with Large ..."

Gaopeng Xue et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451392

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Gaopeng Xue, Masaya Toda, Xinghui Li, Takahito Ono:
Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk. NEMS 2021: 43-46

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