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"SiN-based micro cantilever actuators using NdFeB/Ta permanent magnetic ..."

Sen Yao et al. (2009)

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DOI: 10.1109/NEMS.2009.5068608

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - conf/nems/YaoGSSUY09
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  - https://dblp.org/rec/conf/nems/YaoGSSUY09
Sen Yao, Shunji Goto, Junpei Sakurai, Tadahiko Shinshi, Minoru Uehara, Hitoshi Yamamoto:
SiN-based micro cantilever actuators using NdFeB/Ta permanent magnetic thin film. NEMS 2009: 416-419

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