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"Lithography upon micromirrors."

Manseung Seo, Haeryung Kim (2007)

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DOI: 10.1016/J.CAD.2006.05.007

access: closed

type: Journal Article

metadata version: 2020-02-13

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Manseung Seo, Haeryung Kim:
Lithography upon micromirrors. Comput. Aided Des. 39(3): 202-217 (2007)

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