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"A Surface Micromachined CMOS MEMS Humidity Sensor."

Jian-Qiu Huang et al. (2015)

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DOI: 10.3390/MI6101440

access: open

type: Journal Article

metadata version: 2018-11-26

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  dblp key:
  - journals/micromachines/HuangLZW15
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  - https://dblp.org/rec/journals/micromachines/HuangLZW15
Jian-Qiu Huang, Fei Li, Min Zhao, Kai Wang:
A Surface Micromachined CMOS MEMS Humidity Sensor. Micromachines 6(10): 1569-1576 (2015)

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