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"Effects of precursor aging and post-deposition treatment time on ..."

Kuan Yew Cheong, F. A. Jasni (2007)

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DOI: 10.1016/J.MEJO.2006.11.011

access: closed

type: Journal Article

metadata version: 2020-02-22

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Kuan Yew Cheong, F. A. Jasni:
Effects of precursor aging and post-deposition treatment time on photo-assisted sol-gel derived low-dielectric constant SiO₂ thin film on Si. Microelectron. J. 38(2): 227-230 (2007)

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