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"Reliability Challenges with Ultra-Low k Interlevel Dielectrics."

J. R. Lloyd et al. (2004)

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DOI: 10.1016/J.MICROREL.2004.07.094

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/LloydLLLSHR04
J. R. Lloyd, M. R. Lane, X.-H. Liu, E. Liniger, T. M. Shaw, C.-K. Hu, R. Rosenberg:
Reliability Challenges with Ultra-Low k Interlevel Dielectrics. Microelectron. Reliab. 44(9-11): 1835-1841 (2004)

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