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"Detailed investigation of the effects of La and Al content on the ..."

Masamichi Suzuki, Masato Koyama, Atsuhiro Kinoshita (2010)

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DOI: 10.1016/J.MICROREL.2010.06.009

access: closed

type: Journal Article

metadata version: 2020-02-22

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Masamichi Suzuki, Masato Koyama, Atsuhiro Kinoshita:
Detailed investigation of the effects of La and Al content on the electrical characteristics and reliability properties of La-Al-O gate dielectrics. Microelectron. Reliab. 50(12): 1920-1923 (2010)

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