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"Characterization of fatigued Al lines by means of SThM and XRD: Analysis ..."

R. F. Szeloch et al. (2012)

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DOI: 10.1016/J.MICROREL.2011.11.008

access: closed

type: Journal Article

metadata version: 2021-10-14

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R. F. Szeloch, Pawel Janus, Jaroslaw Serafinczuk, P. M. Szecówka, Grzegorz Józwiak:
Characterization of fatigued Al lines by means of SThM and XRD: Analysis using fast Fourier transform. Microelectron. Reliab. 52(4): 711-717 (2012)

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