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"Travel range extension of a MEMS electrostatic microactuator."

Damrongrit Piyabongkarn et al. (2005)

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DOI: 10.1109/TCST.2004.838572

access: closed

type: Journal Article

metadata version: 2020-06-08

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  - journals/tcst/Piyabongkarn0RSN05
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  - https://dblp.org/rec/journals/tcst/Piyabongkarn0RSN05
Damrongrit Piyabongkarn, Yu Sun, Rajesh Rajamani, A. Serdar Sezen, Bradley J. Nelson:
Travel range extension of a MEMS electrostatic microactuator. IEEE Trans. Control. Syst. Technol. 13(1): 138-145 (2005)

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