Standard-Deviation-Based Adaptive Median Filter for Elimination of Batwing Effects in Step Microstructure Measurement Using Digital Holography
Abstract
:1. Introduction
2. SAMF for Batwing Elimination
2.1. Digital Holography for Microstructure Measurement
2.2. Sources of Batwing
2.3. Principle of SAMF
Algorithm 1 Suppression of the batwing effect in microstructure measurement |
|
3. Experimental Studies and Analysis
3.1. Experiment 1: Measuring the Standard Resolution Target USAF 1951
3.2. Experiment 2: Measurement of the NIM Standard Artifact
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
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Wei, J.; Wu, J.; Wang, C. Standard-Deviation-Based Adaptive Median Filter for Elimination of Batwing Effects in Step Microstructure Measurement Using Digital Holography. Sensors 2024, 24, 5928. https://doi.org/10.3390/s24185928
Wei J, Wu J, Wang C. Standard-Deviation-Based Adaptive Median Filter for Elimination of Batwing Effects in Step Microstructure Measurement Using Digital Holography. Sensors. 2024; 24(18):5928. https://doi.org/10.3390/s24185928
Chicago/Turabian StyleWei, Jiasi, Junjie Wu, and Chen Wang. 2024. "Standard-Deviation-Based Adaptive Median Filter for Elimination of Batwing Effects in Step Microstructure Measurement Using Digital Holography" Sensors 24, no. 18: 5928. https://doi.org/10.3390/s24185928
APA StyleWei, J., Wu, J., & Wang, C. (2024). Standard-Deviation-Based Adaptive Median Filter for Elimination of Batwing Effects in Step Microstructure Measurement Using Digital Holography. Sensors, 24(18), 5928. https://doi.org/10.3390/s24185928