Subsurface damage generated in manufacturing processes directly influences performances
of optical elements, however, the rapid inspection of subsurface damage is unresolved for …

In this paper, we present the mechanical sensitivity improvement of a disk resonator
gyroscope (DRG) by optimizing the thickness distribution of the nested rings. The mechanical …

Micro hemispherical resonator shows great potential for applications in high-performance
gyroscopes. This paper introduces micro hemispherical resonator with teeth-like tines along …

This paper presents a novel micro shell resonator (MSR) with T-shape masses based on
fused silica using out-of-plane electrode structures. Eight circular-distributed T-shape masses …

This work presents the design, analysis, simulation and experiment of a novel ring vibratory
gyroscope based on piezoelectric effect. The gyroscope has a simple millimeter-scale …

To systematically investigate the influence of lapping parameters on subsurface damage (SSD)
depth and characterize the damage feature comprehensively, maximum depth and …

As an emerging label-free detection technology, surface-enhanced Raman scattering (SERS)
has been used for biological detection, food safety, and environmental pollution owing to …

In this paper, we present the mechanical sensitivity improvement of a disk resonator
gyroscope (DRG) by optimizing the thickness distribution of the nested rings. We calculate the …

This paper presents a novel method to achieve permanent frequency trimming between
wineglass modes of micro shell resonator (MSR) with T-shape masses (T-masses) using …

Micro glassblowing can be utilized in the fabrication of high-precision micro shell resonator
due to its acceptable cost and promising performance. Geometric imperfection …