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HomeKey Engineering MaterialsKey Engineering Materials Vols. 132-136Reactions between SiCl4 and NH3 Leading to the...

Reactions between SiCl₄ and NH₃ Leading to the Formation of Silicon Nitride Powders

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Euro Ceramics V

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Periodical:

Key Engineering Materials (Volumes 132-136)

Pages:

149-152

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.132-136.149

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Online since:

April 1997

Authors:

Gerald Ziegenbalg, Thomas Focke, Horst Holldorf, Reinhold Brink, Horst Lange

Keywords:

Gas Phase Synthesis, Hot Wall Reactor, Mass Spectrometric Measurements, NH₃, Powder Preparation, SiCl₄, Silazanes

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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