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ECE 693-001: Foundations of MEMS Technology: Rpandey@bama - Ua.edu

This document provides information about the ECE 693-001 course "Foundations of MEMS Technology" being offered in the fall semester of 2003. The course will be held on Mondays and Wednesdays from 11:00-12:15 PM in room 204 of the Bevill Research Center. It will be taught by Dr. R.K. Pandey and is worth 3 credits. The course objectives are to gain insight into MEMS technology and its applications, understand MEMS materials and device operation principles, and learn MEMS fabrication techniques. Topics to be discussed include an overview of MEMS, common MEMS materials and their properties, microfabrication processes, and integrated MEMS structures for sensing,

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Mukesh Parmar
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114 views2 pages

ECE 693-001: Foundations of MEMS Technology: Rpandey@bama - Ua.edu

This document provides information about the ECE 693-001 course "Foundations of MEMS Technology" being offered in the fall semester of 2003. The course will be held on Mondays and Wednesdays from 11:00-12:15 PM in room 204 of the Bevill Research Center. It will be taught by Dr. R.K. Pandey and is worth 3 credits. The course objectives are to gain insight into MEMS technology and its applications, understand MEMS materials and device operation principles, and learn MEMS fabrication techniques. Topics to be discussed include an overview of MEMS, common MEMS materials and their properties, microfabrication processes, and integrated MEMS structures for sensing,

Uploaded by

Mukesh Parmar
Copyright
© Attribution Non-Commercial (BY-NC)
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as DOC, PDF, TXT or read online on Scribd
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ECE 693-001 : Foundations of MEMS Technology

Fall Semester, 2003; Credit = 3


Day and Time: M,W; 11:00-12:15 PM
Class Room: 204 Bevill Research Center
Instructor: Dr. R. K. Pandey, Office: #124 Bevill Bldg.
Phone: 348-6812 and Email: rpandey@bama.ua.edu
Office Hours: F 11-12:30 AM

I. Course Objectives:
• To gain insight into the MEMS Technology, its importance and impact
• To understand the various functions MEMS system can perform
• To learn the fundamentals of MEMS materials, their physical properties and
principles of operation of MEMS devices
• MEMS specific processing techniques.

II. Topics to discuss:

1. Overview of MEMS technology


2. Materials for MEMS devices and properties:
• Silicon, Silicon Oxide and Silicon Nitride (conductivity, band gap and
optical properties)
• Magnetic materials: Shape Memory Alloys (magnetic moment, hysteresis,
spin properties and magneto-optic effects)
• Piezoelectrics: Quartz, PLZT and PNZT ( Piezoelectricity,
piezoresistivity, electro-optic effects)
• Radiation effect on electronics

3. Processes for Micromachining:


• Lithography
• Surface Machining
• Bulk Machining
• Reactive Ion Etching
• Laser Machining

4. Integrated MEMS Structures:


• Techniques for sensing and actuation
• Micromachined Gyroscopes
• Piezoelectric and Magnetic Actuators
• Direct Electronic Optical Sensors
• Indirect Optical Sensors
• Junction based Photo detectors

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III. Text Book:

• Gregory T.A. Kovacs: Micromachined Transducers Sourcebook,


McGraw-Hill, 1998; ISBN 0-07-290722-3.

IV. Source Materials:

• MEMS & Microsystems: Design and Manufacture by Tai-Ran Hsu,


McGraw Hill, ISBN 0-07-239391-2.
• An Introduction to Micorelectromechanical Systems Engineering by
Nadim Maluf, Artech House, ISBN 0-89006-581-0.
• Fundamentals of Microfabrication by Marc Madou, CRC Press, ISBN 0-
8493-9451-1.
• Micromechanics and MEMS edited by William S. Trimmer, IEEE Press,
ISBN 0-7803-1085-3.
• Journal Articles and Review Papers
• Instructor’s Handouts

V. Performance Evaluation:
• Midterm Exam, TBA (mid October) , Credit = 30 points
• Final Exam, TBA (take home), Credit = 30 points
• Class Project (due by December 3) , Credit = 40 points

Note about Class Project:

Each student will select one topic for the project which must be related to this course.
The title of the topic and abstract (250-300 words) should be submitted for instructor’s
approval prior to working on the project. This will be due early November. Written
project report (approximately 10-12 pages long) will be due one week before the final
examination date. The written report must be in the style of a review journal article or a
research proposal having the typical format as follows: Title, Author’s Name and
Affiliation, Abstract (250-300 words), Objectives, Technical Description, Discussion and
References.

VI. Important Dates:

• September 1 : Labor Day


• November 27 and 28: Thanksgiving Holiday
• December 5: Last day of classes.
• December 8-12: Final examinations
• December 16: Grades due

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