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TSMC 350

This document presents the MOSIS parametric test results for the TSMC 035 technology, specifically for the T27K fabrication lot. It includes detailed transistor parameters, process parameters, capacitance parameters, and circuit parameters, along with SPICE model parameters for NMOS and PMOS transistors. The report serves as a comprehensive reference for understanding the performance characteristics of the semiconductor technology.

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51 views5 pages

TSMC 350

This document presents the MOSIS parametric test results for the TSMC 035 technology, specifically for the T27K fabrication lot. It includes detailed transistor parameters, process parameters, capacitance parameters, and circuit parameters, along with SPICE model parameters for NMOS and PMOS transistors. The report serves as a comprehensive reference for understanding the performance characteristics of the semiconductor technology.

Uploaded by

harsh7edu
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© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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*MOSIS file tsmc-035/t27k_lo_epi-params.

txt

* MOSIS PARAMETRIC TEST RESULTS


*
* RUN: T27K (LO_EPI) VENDOR: TSMC
* TECHNOLOGY: SCN035 FEATURE SIZE: 0.35 microns
*
*
*INTRODUCTION: This report contains the lot average results obtained by MOSIS
* from measurements of MOSIS test structures on each wafer of
* this fabrication lot. SPICE parameters obtained from similar
* measurements on a selected wafer are also attached.*
*
*COMMENTS: TSMC 035

*TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS

* MINIMUM 0.6/0.4
* Vth 0.57 -0.81 volts

* SHORT 20.0/0.4
* Idss 466 -207 uA/um
* Vth 0.60 -0.80 volts
* Vpt 9.3 -9.7 volts

* WIDE 20.0/0.4
* Ids0 < 2.5 < 2.5 pA/um

* LARGE 50/50
* Vth 0.56 -0.77 volts
* Vjbkd 8.3 -8.5 volts
* Ijlk <50.0 <50.0 pA
* Gamma 0.64 0.37 V^0.5

* K' (Uo*Cox/2) 94.3 -32.7 uA/V^2


* Low-field Mobility 426.02 147.73 cm^2/V*s

*COMMENTS: Poly bias varies with design technology. To account for mask and
* etch bias use the appropriate value for the parameter XL in your
* SPICE model card.
* Design Technology XL
* ----------------- -------
* SCN4M_SUBM (lambda=0.20) -0.02
* thick oxide -0.06
* TSMC35 0.03
* thick oxide 0.04
* SCN4M (lambda=0.25) -0.12
* thick oxide -0.06
*
*
*FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS
* Vth Poly >10.0 <-10.0 volts
*
*

*PROCESS PARAMETERS N+ACTV P+ACTV POLY POLY2 MTL1 MTL2 MTL3 UNITS
* Sheet Resistance 3.3 2.6 5.7 0.07 0.07 0.07 ohms/sq
* Contact Resistance 3.5 2.9 4.2 1.08 1.13 ohms
* Gate Oxide Thickness 78 angstrom

*
*PROCESS PARAMETERS MTL4 N\PLY N_WELL UNITS
* Sheet Resistance 0.04 1030 1005 ohms/sq
* Contact Resistance 1.18 ohms

*COMMENTS: N\POLY is N-well under polysilicon.

*CAPACITANCE PARAMETERS N+ACTV P+ACTV POLY M1 M2 M3 M4 N_WELL UNITS


* Area (substrate) 1010 1434 112 31 18 7 -- 56 aF/um^2
* Area (N+active) 4543 41 18 13 10 aF/um^2
* Area (P+active) 4526 aF/um^2
* Area (poly) 64 17 10 7 aF/um^2
* Area (metal1) 39 15 9 aF/um^2
* Area (metal2) 40 14 aF/um^2
* Area (metal3) 36 aF/um^2
* Fringe (substrate) 349 418 47 34 53 14 aF/um
* Fringe (poly) 70 39 30 25 aF/um
* Fringe (metal1) 60 37 29 aF/um
* Fringe (metal2) 54 38 aF/um
* Fringe (metal3) 60 aF/um
* Overlap (N+active) 266 aF/um
* Overlap (P+active) 299 aF/um

*CIRCUIT PARAMETERS UNITS


* Inverters K
* Vinv 1.0 1.22 volts
* Vinv 1.5 1.34 volts
* Vol (100 uA) 2.0 0.26 volts
* Voh (100 uA) 2.0 2.81 volts
* Vinv 2.0 1.44 volts
* Gain 2.0 -20.22
* Ring Oscillator Freq.
* DIV256 (31-stg,3.3V) 163.36 MHz
* D256_THK (31-stg,5.0V) 104.52 MHz
* Ring Oscillator Power
* DIV256 (31-stg,3.3V) 0.16 uW/MHz/gate
* D256_THK (31-stg,5.0V) 0.30 uW/MHz/gate

*COMMENTS: SUBMICRON

*
T27K SPICE BSIM3 VERSION 3.1 PARAMETERS

*SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8

* DATE: Sep 18/02


* LOT: T27K WAF: 9001
* Temperature_parameters=Default
.MODEL NMOS NMOS ( LEVEL = 49
+VERSION = 3.1 TNOM = 27 TOX = 7.8E-9
+XJ = 1E-7 NCH = 2.2E17 VTH0 = 0.540486
+K1 = 0.5516489 K2 = 0.0238324 K3 = 4.0027E-3
+K3B = -9.7277466 W0 = 1.840877E-5 NLX = 2.016814E-7
+DVT0W = 0 DVT1W = 0 DVT2W = 0
+DVT0 = 4.5564366 DVT1 = 0.9630947 DVT2 = -0.1923249
+U0 = 433.3697729 UA = -3.92535E-12 UB = 1.547027E-18
+UC = 3.617125E-11 VSAT = 1.832515E5 A0 = 1.142713
+AGS = 0.1549776 B0 = 1.091029E-6 B1 = 5E-6
+KETA = 5.349809E-3 A1 = 0 A2 = 0.3815018
+RDSW = 934.2877955 PRWG = -0.0191681 PRWB = -0.1323085
+WR = 1 WINT = 6.714226E-8 LINT = 0
+XL = -2E-8 XW = 0 DWG = -5.854052E-9
+DWB = 3.137813E-9 VOFF = -0.0934621 NFACTOR = 1.3252139
+CIT = 0 CDSC = 2.4E-4 CDSCD = 0
+CDSCB = 0 ETA0 = 0.9438858 ETAB = -0.0275447
+DSUB = 0.7902402 PCLM = 1.478351 PDIBLC1 = 3.502935E-4
+PDIBLC2 = 4.702685E-3 PDIBLCB = -1E-3 DROUT = 0.0535434
+PSCBE1 = 5.434746E8 PSCBE2 = 3.7809E-5 PVAG = 9.703238E-3
+DELTA = 0.01 RSH = 3.3 MOBMOD = 1
+PRT = 0 UTE = -1.5 KT1 = -0.11
+KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9
+UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4
+WL = 0 WLN = 1 WW = 0
+WWN = 1 WWL = 0 LL = 0
+LLN = 1 LW = 0 LWN = 1
+LWL = 0 CAPMOD = 2 XPART = 0.5
+CGDO = 2.66E-10 CGSO = 2.66E-10 CGBO = 1E-12
+CJ = 1.003264E-3 PB = 0.7335577 MJ = 0.3159433
+CJSW = 3.601271E-10 PBSW = 0.6478789 MJSW = 0.1175036
+CJSWG = 1.82E-10 PBSWG = 0.6478789 MJSWG = 0.1175036
+CF = 0 PVTH0 = -0.0237359 PRDSW = -118.0811334
+PK2 = 2.139682E-3 WKETA = -4.981161E-3 LKETA = 6.343167E-4 )
*
.MODEL PMOS PMOS ( LEVEL = 49
+VERSION = 3.1 TNOM = 27 TOX = 7.8E-9
+XJ = 1E-7 NCH = 8.52E16 VTH0 = -0.756216
+K1 = 0.4311779 K2 = -0.0115536 K3 = 54.4562842
+K3B = -5 W0 = 6.577617E-6 NLX = 2.160161E-7
+DVT0W = 0 DVT1W = 0 DVT2W = 0
+DVT0 = 1.072919 DVT1 = 0.5759336 DVT2 = -0.0434365
+U0 = 157.3607079 UA = 1.033456E-10 UB = 2.067525E-18
+UC = -2.19024E-11 VSAT = 1.58892E5 A0 = 0.9227803
+AGS = 0.3618803 B0 = 2.895996E-6 B1 = 5E-6
+KETA = -6.133969E-3 A1 = 1.311699E-4 A2 = 0.799505
+RDSW = 4E3 PRWG = -0.1510998 PRWB = 0.0488607
+WR = 1 WINT = 6.708611E-8 LINT = 0
+XL = -2E-8 XW = 0 DWG = -1.853554E-8
+DWB = 1.078164E-8 VOFF = -0.1255689 NFACTOR = 1.9008141
+CIT = 0 CDSC = 2.4E-4 CDSCD = 0
+CDSCB = 0 ETA0 = 8.542933E-4 ETAB = 0.1410237
+DSUB = 3.693337E-3 PCLM = 4.5683118 PDIBLC1 = 0.1391832
+PDIBLC2 = 4.052383E-4 PDIBLCB = 0.1 DROUT = 0.4219987
+PSCBE1 = 7.936523E10 PSCBE2 = 5E-10 PVAG = 7.0742082
+DELTA = 0.01 RSH = 2.6 MOBMOD = 1
+PRT = 0 UTE = -1.5 KT1 = -0.11
+KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9
+UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4
+WL = 0 WLN = 1 WW = 0
+WWN = 1 WWL = 0 LL = 0
+LLN = 1 LW = 0 LWN = 1
+LWL = 0 CAPMOD = 2 XPART = 0.5
+CGDO = 2.99E-10 CGSO = 2.99E-10 CGBO = 1E-12
+CJ = 1.437988E-3 PB = 0.99 MJ = 0.5533161
+CJSW = 4.091637E-10 PBSW = 0.4121793 MJSW = 0.2027948
+CJSWG = 4.42E-11 PBSWG = 0.4121793 MJSWG = 0.2027948
+CF = 0 PVTH0 = 7.063761E-3 PRDSW = -81.4334699
+PK2 = 1.522781E-3 WKETA = 2.442193E-3 LKETA = -4.316214E-3 )
*

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