Datasheet F-203AI
Mass Flow Controller for Gases
> Introduction
Bronkhorst High-Tech model F-203AI Mass Flow Controllers
(MFCs) are suited for precise control of virtually all conventional
process gases. The MFC consists of a thermal mass flow sensor,
a precise control valve and a microprocessor based PID controller
with signal and fieldbus conversion. As a function of a setpoint
value, the flow controller swiftly adjusts the desired flow rate.
The IN-FLOW model is of rugged design (IP65) for use in industrial
environments or even Zone 2 hazardous areas, with optional ATEX
Cat. 3 approval. The mass flow, expressed in normal litres per
minute or normal cubic metres per hour, is provided as analog
signal or digitally via RS232 or fieldbus. The flow range, wetted
materials and orifice size for the control valve are determined
depending of the type of gas and the process conditions of the
application.
> Technical specifications                                                                                     IN-FLOW Mass Flow Controller model F-203AI
 Measurement / control system
 Accuracy (incl. linearity)           : ± 0,5% Rd plus ± 0,1% FS
 (Based on actual calibration)                                                             Electrical properties
 Turndown                             : 1 : 50 (in digital mode up to 1:187,5)             Power supply                    : +15…24 Vdc ±10%
 Multiple fluid capability            : storage of max. 8 calibration curves               Power consumption               : max. 320 mA;
 Repeatability                        : < ± 0,2% Rd                                                                          add 50 mA for Profibus, if applicable
 Settling time (controller)           : 2...4 seconds                                      Analog output (0…100%)          : 0…5 (10) Vdc, min. load impedance > 2 kΩ;
 Control stability                    : ≤ ± 0,1% FS                                                                          0 (4)…20 mA (sourcing), max. load impedance < 375 Ω
 Kv-value                             : 0,15…1,5                                           Analog setpoint (0…100%)        : 0…5 (10) Vdc, min. load impedance > 100 kΩ;
 Temperature range                    : -10…+70°C                                                                            0 (4)…20 mA, load impedance ~250 Ω
                                       for ATEX cat. 3 0…50°C                              Digital communication           : standard RS232 ; options: PROFIBUS DP, DeviceNetTM,
 Temperature sensitivity              : zero: < ± 0,05% FS/°C;                                                               Modbus-RTU/ASCII, FLOW-BUS
 (nominal range)                       span: < ± 0,05% Rd/°C
 Pressure sensitivity                 : 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2
 Leak integrity (outboard)            : < 2 x 10-9 mbar l/s He                             > Ranges (based on Air)
 Attitude sensitivity                 : max. error at 90° off horizontal 0,2% FS
                                       at 1 bar, typical N2
                                                                                            Model                  minimum               nominal                 maximum
 Warm-up time                         : 30 min. for optimum accuracy                       F-203AI-M50             4…200 ln/min          4…500 ln/min            4…750 ln/min
                                       2 min. for accuracy ± 2% FS                         F-203AI-1M0             8…400 ln/min          8…1000 ln/min           8…1670 ln/min
                                                                                            Intermediate ranges are available
 Mechanical parts
 Material (wetted parts)              : stainless steel 316L or comparable
 Pressure rating                      : 64 bar abs
 Process connections                  : compression type or face seal male
 Seals                                : standard : Viton; options: EPDM, Kalrez
 Ingress protection (housing)         : IP65
 Although all specifications in this datasheet are believed to be accurate, the right is
 reserved to make changes without notice or obligation.
> Model number identification
             F           N           N          NAA               NNN              A         A         A            NN                A
          Base                                             Nominal range                                                      Internal seals
          2 Controller                                     Factory selected                                                   V Viton (factory standard)
                                                                                                                              E EPDM
                                                                                                                              K Kalrez (FFKM)
                                                           Communication (I/O)
                                                           A RS232 + analog (n/c control)
          Pressure rating                                  B RS232 + analog (n/o control)
          0 64 bar                                         D RS232 + DeviceNet (n/c)                                Connections (in/out)
                                                           E RS232 + DeviceNet (n/o)                                4 12 mm OD compression type
                                                           M RS232 + Modbus (n/c)                                   5 ½“ OD compression type
                                                           N RS232 + Modbus (n/o)                                   6 20 mm OD compression type
                                                           P RS232 + PROFIBUS DP (n/c)                              9 other (e.g. ½” Face seal male)
          Ranges                                           Q RS232 + PROFIBUS DP (n/o)                              0 none
          3AI 0…200 / 0…1670 ln/min                        R RS232 + FLOW-BUS (n/c)
                                                           S RS232 + FLOW-BUS (n/o)
                                                           Analog output                                Supply voltage
                                                           A 0…5 Vdc                                    D + 15…24 Vdc
                                                           B 0…10 Vdc
                                                           F 0…20 mA sourcing
                                                           G 4…20 mA sourcing
> Thermal mass flow measuring principle                                                > State of the art digital design
The heart of the thermal mass flow meter/controller is the sensor, that                Todays IN-FLOW series are equipped with a digital pc-board,
consists of a stainless steel capillary tube with resistance thermometer               offering high accuracy, excellent temperature stability and fast
elements. A part of the gas flows through this bypass sensor, and is                   response (settling times t98 down to 500 msec). The basic digital
warmed up heating elements. Consequently the measured                                  pc-board contains all of the general functions needed for
temperatures T1 and T2 drift apart. The temperature difference is                      measurement and control. In addition to the standard RS232 output
directly proportional to mass flow through the sensor. In the main                     the instruments also offer analog I/O. Furthermore, an integrated
channel Bronkhorst High-Tech applies a patented laminar flow                           interface board provides DeviceNetTM, PROFIBUS DP, Modbus-
element consisting of a stack of stainless steel discs with precision-                 RTU/ASCII or FLOW-BUS protocols.
etched flow channels. Thanks to the perfect flow-split the sensor
output is proportional to the total mass flow rate.
   ∆T = k.Cp.Øm ∆T = T2-T1 in Kelvin Cp = specific heat   Øm = mass flow
Functional scheme of the thermal mass flow sensor                                      Functional scheme of the digital PC-board
> Hook-up diagram for analog or RS232 communication
> Hook-up diagrams for fieldbus communication
For the available fieldbus options we refer to the various hook-up diagrams as indicated below. If you are viewing this datasheet in digital
format, you may use the hyperlink to each of the drawings. Otherwise please visit the download section on www.bronkhorst.com or contact
our local representatives.
                 Doc. 9.16.054                                                       Doc. 9.16.053
                                        Doc. 9.16.065                    Doc. 9.16.052                    Doc. 9.16.051
> Dimensions (mm) and weight (kg)
                                                                                    Dimension table adapters (RS-type)
   Weight: 5,0 kg
> Options and accessories
- Multi-Gas / Multi-Range option, with free configuration software.
- Free software support for operation, monitoring, optimizing or to interface
  between digital instruments and windows software.
- IN-LINE filters for protection against particulates
- BRIGHT compact local Readout/Control module
- E-8000 Power Supply
- Interconnecting cables for power and analog/digital communication
- PiPS Plug-in Power Supply
- Optional ATEX Zone 2 Cat. 3 protection. Hereto we will furnish extra cover(s) for mechanical impact protection (see pictures),
  including applicable certificate(s).
> Alternatives
- IN-FLOWCTA direct (no by-pass), industrial (IP65) Mass Flow Meter with close-coupled Control Valve                               E.DS.F-203AI.0116.B
                                                     Nijverheidsstraat 1a, NL-7261 AK Ruurlo The Netherlands
                                    T +31 (0)573 45 88 00 F +31 (0)573 45 88 08 I www.bronkhorst.com E info@bronkhorst.com