MOSFET 1

MOSFET
The metal–oxide–semiconductor field-effect
transistor (MOSFET, MOS-FET, or MOS FET) is a
device used for amplifying or switching electronic
signals. The basic principle of the device was first
proposed by Julius Edgar Lilienfeld in 1925. In
MOSFETs, a voltage on the oxide-insulated gate
electrode can induce a conducting channel between the
two other contacts called source and drain. The channel
can be of n-type or p-type (see article on semiconductor
devices), and is accordingly called an nMOSFET or a
pMOSFET (also commonly nMOS, pMOS). It is by far
the most common transistor in both digital and analog
Two power MOSFETs in the surface-mount package D2PAK.
circuits, though the bipolar junction transistor was at Operating as switches, each of these components can sustain a
one time much more common. blocking voltage of 120 volts in the OFF state, and can conduct a
continuous current of 30 amperes in the ON state, dissipating up to
The 'metal' in the name is now often a misnomer about 100 watts and controlling a load of over 2000 watts. A
because the previously metal gate material is now often matchstick is pictured for scale.

a layer of polysilicon (polycrystalline silicon).

Aluminium had been the gate material until the mid
1970s, when polysilicon became dominant, due to its
capability to form self-aligned gates. Metallic gates are
regaining popularity, since it is difficult to increase the
speed of operation of transistors without metal gates.

IGFET is a related term meaning insulated-gate

field-effect transistor, and is almost synonymous with
MOSFET, though it can refer to FETs with a gate
insulator that is not oxide. Another synonym is A cross section through an nMOSFET when the gate voltage VGS
MISFET for metal–insulator–semiconductor FET. is below the threshold for making a conductive channel; there is
little or no conduction between the terminals source and drain; the
switch is off. When the gate is more positive, it attracts electrons,
inducing an n-type conductive channel in the substrate below the
oxide, which allows electrons to flow between the n-doped
terminals; the switch is on.
MOSFET 2

Simulation result for formation of inversion channel (electron density) and attainment of
threshold voltage (IV) in a nanowire MOSFET. Note that the threshold voltage for this
device lies around 0.45V.

Composition
Usually the semiconductor of choice is
silicon, but some chip manufacturers, most
notably IBM, recently started using a
chemical compound of silicon and
germanium (SiGe) in MOSFET channels.
Unfortunately, many semiconductors with
better electrical properties than silicon, such
as gallium arsenide, do not form good
semiconductor-to-insulator interfaces, thus
are not suitable for MOSFETs. Research
continues on creating insulators with
acceptable electrical characteristics on other
semiconductor material. Photomicrograph of two metal-gate MOSFETs in a test pattern. Probe pads for two
gates and three source/drain nodes are labeled.
In order to overcome power consumption
increase due to gate current leakage, high-κ
dielectric replaces silicon dioxide for the gate insulator, while metal gates return by replacing polysilicon (see Intel
announcement[1] ).
The gate is separated from the channel by a thin insulating layer, traditionally of silicon dioxide and later of silicon
oxynitride. Some companies have started to introduce a high-κ dielectric + metal gate combination in the 45
nanometer node.
When a voltage is applied between the gate and body terminals, the electric field generated penetrates through the
oxide and creates an alleged "inversion layer" or "channel" at the semiconductor-insulator interface. The inversion
channel is of the same type, P-type or N-type, as the source and drain, thus it provides a channel through which
current can pass. Varying the voltage between the gate and body modulates the conductivity of this layer and allows
to control the current flow between drain and source.
MOSFET 3

Circuit symbols
A variety of symbols are used for the MOSFET. The basic design is generally a line for the channel with the source
and drain leaving it at right angles and then bending back at right angles into the same direction as the channel.
Sometimes three line segments are used for enhancement mode and a solid line for depletion mode. Another line is
drawn parallel to the channel for the gate.
The bulk connection, if shown, is shown connected to the back of the channel with an arrow indicating PMOS or
NMOS. Arrows always point from P to N, so an NMOS (N-channel in P-well or P-substrate) has the arrow pointing
in (from the bulk to the channel). If the bulk is connected to the source (as is generally the case with discrete devices)
it is sometimes angled to meet up with the source leaving the transistor. If the bulk is not shown (as is often the case
in IC design as they are generally common bulk) an inversion symbol is sometimes used to indicate PMOS,
alternatively an arrow on the source may be used in the same way as for bipolar transistors (out for nMOS, in for
pMOS).
Comparison of enhancement-mode and depletion-mode MOSFET symbols, along with JFET symbols (drawn with
source and drain ordered such that higher voltages appear higher on the page than lower voltages):

P-channel

N-channel

JFET MOSFET enh MOSFET enh (no bulk) MOSFET dep

For the symbols in which the bulk, or body, terminal is shown, it is here shown internally connected to the source.
This is a typical configuration, but by no means the only important configuration. In general, the MOSFET is a
four-terminal device, and in integrated circuits many of the MOSFETs share a body connection, not necessarily
connected to the source terminals of all the transistors.

MOSFET operation

Metal–oxide–semiconductor structure
A traditional metal–oxide–semiconductor (MOS) structure is obtained
by growing a layer of silicon dioxide (SiO2) on top of a silicon
substrate and depositing a layer of metal or polycrystalline silicon (the
latter is commonly used). As the silicon dioxide is a dielectric material,
its structure is equivalent to a planar capacitor, with one of the
electrodes replaced by a semiconductor.

When a voltage is applied across a MOS structure, it modifies the

distribution of charges in the semiconductor. If we consider a P-type
semiconductor (with the density of acceptors, p the density of holes; p
Example application of an N-Channel MOSFET.
= NA in neutral bulk), a positive voltage, , from gate to body (seeWhen the switch is pushed the LED lights up.[2]
figure) creates a depletion layer by forcing the positively charged holes
away from the gate-insulator/semiconductor interface,
MOSFET 4

leaving exposed a carrier-free region of immobile, negatively charged

acceptor ions (see doping (semiconductor)). If is high enough, a high
concentration of negative charge carriers forms in an inversion layer
located in a thin layer next to the interface between the semiconductor
and the insulator. Unlike the MOSFET, where the inversion layer
electrons are supplied rapidly from the source/drain electrodes, in the Metal–oxide–semiconductor structure on P-type
MOS capacitor they are produced much more slowly by thermal silicon
generation through carrier generation and recombination centers in the
depletion region. Conventionally, the gate voltage at which the volume density of electrons in the inversion layer is
the same as the volume density of holes in the body is called the threshold voltage.

This structure with P-type body is the basis of the N-type MOSFET, which requires the addition of an N-type source
and drain regions.

MOSFET structure and channel formation

A metal–oxide–semiconductor field-effect transistor (MOSFET) is
based on the modulation of charge concentration by a MOS
capacitance between a body electrode and a gate electrode located
above the body and insulated from all other device regions by a gate
dielectric layer which in the case of a MOSFET is an oxide, such as
silicon dioxide. If dielectrics other than an oxide such as silicon
dioxide (often referred to as oxide) are employed the device may be
referred to as a metal–insulator–semiconductor FET (MISFET).
Compared to the MOS capacitor, the MOSFET includes two additional
terminals (source and drain), each connected to individual highly
doped regions that are separated by the body region. These regions can Cross section of an NMOS without channel
be either p or n type, but they must both be of the same type, and of formed: OFF state
opposite type to the body region. The source and drain (unlike the
body) are highly doped as signified by a '+' sign after the type of
doping.

If the MOSFET is an n-channel or nMOS FET, then the source and

drain are 'n+' regions and the body is a 'p' region. As described above,
with sufficient gate voltage, holes from the body are driven away from
the gate, forming an inversion layer or n-channel at the interface
between the p region and the oxide. This conducting channel extends
between the source and the drain, and current is conducted through it
when a voltage is applied between source and drain.

For gate voltages below the threshold value, the channel is lightly
Cross section of an NMOS with channel formed:
populated, and only a very small subthreshold leakage current can flow
ON state
between the source and the drain.
If the MOSFET is a p-channel or pMOS FET, then the source and drain are 'p+' regions and the body is a 'n' region.
When a negative gate-source voltage (positive source-gate) is applied, it creates a p-channel at the surface of the n
region, analogous to the n-channel case, but with opposite polarities of charges and voltages. When a voltage less
negative than the threshold value (a negative voltage for p-channel) is applied between gate and source, the channel
disappears and only a very small subthreshold current can flow between the source and the drain.
MOSFET 5

The source is so named because it is the source of the charge carriers (electrons for n-channel, holes for p-channel)
that flow through the channel; similarly, the drain is where the charge carriers leave the channel.
The device may comprise a Silicon On Insulator (SOI) device in which a Buried OXide (BOX) is formed below a
thin semiconductor layer. If the channel region between the gate dielectric and a Buried Oxide (BOX) region is very
thin, the very thin channel region is referred to as an Ultra Thin Channel (UTC) region with the source and drain
regions formed on either side thereof in and/or above the thin semiconductor layer. Alternatively, the device may
comprise a SEMiconductor On Insulator (SEMOI) device in which semiconductors other than silicon are employed.
Many alternative semicondutor materials may be employed.
When the source and drain regions are formed above the channel in whole or in part, they are referred to as Raised
Source/Drain (RSD) regions.

Modes of operation
The operation of a MOSFET can be separated into three different modes, depending on the voltages at the terminals.
In the following discussion, a simplified algebraic model is used that is accurate only for old technology. Modern
MOSFET characteristics require computer models that have rather more complex behavior.
For an enhancement-mode, n-channel MOSFET, the three operational modes are:
Cutoff, subthreshold, or weak-inversion mode
When VGS < Vth:
where is the threshold voltage of the device.
According to the basic threshold model, the transistor is turned off, and there is no conduction between drain
and source. In reality, the Boltzmann distribution of electron energies allows some of the more energetic
electrons at the source to enter the channel and flow to the drain, resulting in a subthreshold current that is an
exponential function of gate–source voltage. While the current between drain and source should ideally be
zero when the transistor is being used as a turned-off switch, there is a weak-inversion current, sometimes
called subthreshold leakage.
In weak inversion the current varies exponentially with gate-to-source bias as given approximately by:[3]
[4]

,
where = current at and the slope factor n is given by
,
with = capacitance of the depletion layer and = capacitance of the oxide layer. In a long-channel
device, there is no drain voltage dependence of the current once , but as channel length is
reduced drain-induced barrier lowering introduces drain voltage dependence that depends in a complex way
upon the device geometry (for example, the channel doping, the junction doping and so on). Frequently,
threshold voltage Vth for this mode is defined as the gate voltage at which a selected value of current ID0
occurs, for example, ID0 = 1 μA, which may not be the same Vth-value used in the equations for the following
modes.
Some micropower analog circuits are designed to take advantage of subthreshold conduction.[5] [6] [7] By
working in the weak-inversion region, the MOSFETs in these circuits deliver the highest possible
transconductance-to-current ratio, namely: , almost that of a bipolar transistor.[8]
The subthreshold I–V curve depends exponentially upon threshold voltage, introducing a strong dependence
on any manufacturing variation that affects threshold voltage; for example: variations in oxide thickness,
junction depth, or body doping that change the degree of drain-induced barrier lowering. The resulting
sensitivity to fabricational variations complicates optimization for leakage and performance.[9] [10]
MOSFET 6

Triode mode or linear region (also known as

the ohmic mode[11] [12] )
When VGS > Vth and VDS < ( VGS -
Vth )
The transistor is turned on, and a
channel has been created which
allows current to flow between the
drain and the source. The MOSFET
operates like a resistor, controlled by
the gate voltage relative to both the
source and drain voltages. The current
from drain to source is modeled as:

MOSFET drain current vs. drain-to-source voltage for several values of

; the boundary between linear (Ohmic) and saturation (active)
modes is indicated by the upward curving parabola.

Cross section of a MOSFET operating in the

linear (Ohmic) region; strong inversion region
present even near drain

Cross section of a MOSFET operating in the

saturation (active) region; channel exhibits
pinch-off near drain

where is the charge-carrier effective mobility, is the gate width, is the gate length and is the
gate oxide capacitance per unit area. The transition from the exponential subthreshold region to the triode
region is not as sharp as the equations suggest.
Saturation or active mode[3] [13]
When VGS > Vth and VDS > ( VGS - Vth )
The switch is turned on, and a channel has been created, which allows current to flow between the drain and
source. Since the drain voltage is higher than the gate voltage, the electrons spread out, and conduction is not
MOSFET 7

through a narrow channel but through a broader, two- or three-dimensional current distribution extending
away from the interface and deeper in the substrate. The onset of this region is also known as pinch-off to
indicate the lack of channel region near the drain. The drain current is now weakly dependent upon drain
voltage and controlled primarily by the gate–source voltage, and modeled very approximately as:

The additional factor involving λ, the channel-length modulation parameter, models current dependence on
drain voltage due to the Early effect, or channel length modulation. According to this equation, a key design
parameter, the MOSFET transconductance is:

,
where the combination Vov = VGS - Vth is called the overdrive voltage.[14] Another key design parameter is the
MOSFET output resistance given by:

rout is the inverse of gds where . VDS is the expression in saturation region.

If λ is taken as zero, an infinite output resistance of the device results that leads to unrealistic circuit
predictions, particularly in analog circuits.
As the channel length becomes very short, these equations become quite inaccurate. New physical effects
arise. For example, carrier transport in the active mode may become limited by velocity saturation. When
velocity saturation dominates, the saturation drain current is more nearly linear than quadratic in VGS. At even
shorter lengths, carriers transport with near zero scattering, known as quasi-ballistic transport. In addition, the
output current is affected by drain-induced barrier lowering of the threshold voltage.

Body effect
The body effect describes the changes
in the threshold voltage by the change
in the source-bulk voltage,
approximated by the following
equation:

Ohmic contact to body to ensure no body bias; top left:subthreshold, top right:Ohmic
mode, bottom left:Active mode at onset of pinch-off, bottom right: Active mode well into
pinch-off - channel length modulation evident

where is the threshold voltage with substrate bias present, and is the zero- value of threshold
voltage, is the body effect parameter, and is the surface potential parameter.
MOSFET 8

The body can be operated as a second gate, and is sometimes referred to as the "back gate"; the body effect is
sometimes called the "back-gate effect".[15]

The primacy of MOSFETs

In 1959, Dawon Kahng and Martin M. (John) Atalla at Bell Labs invented the metal–oxide–semiconductor
field-effect transistor (MOSFET).[16] Operationally and structurally different from the bipolar junction transistor,[17]
the MOSFET was made by putting an insulating layer on the surface of the semiconductor and then placing a
metallic gate electrode on that. It used crystalline silicon for the semiconductor and a thermally oxidized layer of
silicon dioxide for the insulator. The silicon MOSFET did not generate localized electron traps at the interface
between the silicon and its native oxide layer, and thus was inherently free from the trapping and scattering of
carriers that had impeded the performance of earlier field-effect transistors. Following the (expensive) development
of clean rooms to reduce contamination to levels never before thought necessary, and of photolithography[18] and the
planar process to allow circuits to be made in very few steps, the Si–SiO2 system possessed such technical attractions
as low cost of production (on a per circuit basis) and ease of integration. Largely because of these two factors, the
MOSFET has become the most widely used type of transistor in integrated circuits.

CMOS circuits
The MOSFET is used in digital CMOS logic,[19] which uses p- and n-channel MOSFETs as building blocks.
Overheating is a major concern in integrated circuits since ever more transistors are packed into ever smaller chips.
CMOS logic reduces power consumption because no current flows (ideally), and thus no power is consumed, except
when the inputs to logic gates are being switched. CMOS accomplishes this current reduction by complementing
every nMOSFET with a pMOSFET and connecting both gates and both drains together. A high voltage on the gates
will cause the nMOSFET to conduct and the pMOSFET not to conduct and a low voltage on the gates causes the
reverse. During the switching time as the voltage goes from one state to another, both MOSFETs will conduct
briefly. This arrangement greatly reduces power consumption and heat generation. Digital and analog CMOS
applications are described below.

Digital
The growth of digital technologies like the microprocessor has provided the motivation to advance MOSFET
technology faster than any other type of silicon-based transistor. A timeline can be found at computerhistory.org.[20]
A big advantage of MOSFETs for digital switching is that the oxide layer between the gate and the channel prevents
DC current from flowing through the gate, further reducing power consumption and giving a very large input
impedance. The insulating oxide between the gate and channel effectively isolates a MOSFET in one logic stage
from earlier and later stages, which allows a single MOSFET output to drive a considerable number of MOSFET
inputs. Bipolar transistor-based logic (such as TTL) does not have such a high fanout capacity. This isolation also
makes it easier for the designers to ignore to some extent loading effects between logic stages independently. That
extent is defined by the operating frequency: as frequencies increase, the input impedance of the MOSFETs
decreases.

Analog
The MOSFET's advantages in most digital circuits do not translate into supremacy in all analog circuits. The two
types of circuit draw upon different features of transistor behavior. Digital circuits switch, spending most of their
time outside the switching region, while analog circuits depend on MOSFET behavior held precisely in the switching
region of operation. The bipolar junction transistor (BJT) has traditionally been the analog designer's transistor of
choice, due largely to its higher transconductance and its higher output impedance (drain-voltage independence) in
the switching region.
MOSFET 9

Nevertheless, MOSFETs are widely used in many types of analog circuits because of certain advantages. The
characteristics and performance of many analog circuits can be designed by changing the sizes (length and width) of
the MOSFETs used. By comparison, in most bipolar transistors the size of the device does not significantly affect the
performance. MOSFETs' ideal characteristics regarding gate current (zero) and drain-source offset voltage (zero)
also make them nearly ideal switch elements, and also make switched capacitor analog circuits practical. In their
linear region, MOSFETs can be used as precision resistors, which can have a much higher controlled resistance than
BJTs. In high power circuits, MOSFETs sometimes have the advantage of not suffering from thermal runaway as
BJTs do. Also, they can be formed into capacitors and gyrator circuits which allow op-amps made from them to
appear as inductors, thereby allowing all of the normal analog devices, except for diodes (which can be made smaller
than a MOSFET anyway), to be built entirely out of MOSFETs. This allows for complete analog circuits to be made
on a silicon chip in a much smaller space.
Some ICs combine analog and digital MOSFET circuitry on a single mixed-signal integrated circuit, making the
needed board space even smaller. This creates a need to isolate the analog circuits from the digital circuits on a chip
level, leading to the use of isolation rings and Silicon-On-Insulator (SOI). The main advantage of BJTs versus
MOSFETs in the analog design process is the ability of BJTs to handle a larger current in a smaller space.
Fabrication processes exist that incorporate BJTs and MOSFETs into a single device. Mixed-transistor devices are
called Bi-FETs (Bipolar-FETs) if they contain just one BJT-FET and BiCMOS (bipolar-CMOS) if they contain
complementary BJT-FETs. Such devices have the advantages of both insulated gates and higher current density.

Advantages of BJT over MOSFET

BJTs have some advantages over MOSFETs for at least two digital applications. Firstly, in high speed switching,
they do not have the "larger" capacitance from the gate, which when multiplied by the resistance of the channel gives
the intrinsic time constant of the process. The intrinsic time constant places a limit on the speed a MOSFET can
operate at because higher frequency signals are filtered out. Widening the channel reduces the resistance of the
channel, but increases the capacitance by the exact same amount. Reducing the width of the channel increases the
resistance, but reduces the capacitance by the same amount. R*C=Tc1, 0.5R*2C=Tc1, 2R*0.5C=Tc1. There is no
way to minimize the intrinsic time constant for a certain process. Different processes using different channel lengths,
channel heights, gate thicknesses and materials will have different intrinsic time constants. This problem is mostly
avoided with a BJT because it does not have a gate.
The second application where BJTs have an advantage over MOSFETs stems from the first. When driving many
other gates, called fanout, the resistance of the MOSFET is in series with the gate capacitances of the other FETs,
creating a secondary time constant. Delay circuits use this fact to create a fixed signal delay by using a small CMOS
device to send a signal to many other, many times larger CMOS devices. The secondary time constant can be
minimized by increasing the driving FET's channel width to decrease its resistance and decreasing the channel
widths of the FETs being driven, decreasing their capacitance. The drawback is that it increases the capacitance of
the driving FET and increases the resistance of the FETs being driven, but usually these drawbacks are a minimal
problem when compared to the timing problem. BJTs are better able to drive the other gates because they can output
more current than MOSFETs, allowing for the FETs being driven to charge faster. Many chips use MOSFET inputs
and BiCMOS outputs (see above).

MOSFET scaling
Over the past decades, the MOSFET has continually been scaled down in size; typical MOSFET channel lengths
were once several micrometres, but modern integrated circuits are incorporating MOSFETs with channel lengths of
tens of nanometers. Intel began production of a process featuring a 32 nm feature size (with the channel being even
shorter) in late 2009. The semiconductor industry maintains a "roadmap", the ITRS [21] , which sets the pace for
MOSFET development. Historically, the difficulties with decreasing the size of the MOSFET have been associated
MOSFET 10

with the semiconductor device fabrication process, the need to use very low voltages, and with poorer electrical
performance necessitating circuit redesign and innovation (small MOSFETs exhibit higher leakage currents, and
lower output resistance, discussed below).

Reasons for MOSFET scaling

Smaller MOSFETs are desirable for several reasons. The main reason to make transistors smaller is to pack more
and more devices in a given chip area. This results in a chip with the same functionality in a smaller area, or chips
with more functionality in the same area. Since fabrication costs for a semiconductor wafer are relatively fixed, the
cost per integrated circuits is mainly related to the number of chips that can be produced per wafer. Hence, smaller
ICs allow more chips per wafer, reducing the price per chip. In fact, over the past 30 years the number of transistors
per chip has been doubled every 2–3 years once a new technology node is introduced. For example the number of
MOSFETs in a microprocessor fabricated in a 45 nm technology is twice as many as in a 65 nm chip. This doubling
of the transistor count was first observed by Gordon Moore in 1965 and is commonly referred to as Moore's law.[22]
It is also expected that smaller
transistors switch faster. For example,
one approach to size reduction is a
scaling of the MOSFET that requires
all device dimensions to reduce
proportionally. The main device
dimensions are the transistor length,
width, and the oxide thickness, each
(used to) scale with a factor of 0.7 per
node. This way, the transistor channel
resistance does not change with
scaling, while gate capacitance is cut
by a factor of 0.7. Hence, the RC delay Trend of Intel CPU transistor gate length
of the transistor scales with a factor of
0.7.

While this has been traditionally the case for the older technologies, for the state-of-the-art MOSFETs reduction of
the transistor dimensions does not necessarily translate to higher chip speed because the delay due to
interconnections is more significant.

Difficulties arising due to MOSFET size reduction

Producing MOSFETs with channel lengths much smaller than a micrometer is a challenge, and the difficulties of
semiconductor device fabrication are always a limiting factor in advancing integrated circuit technology. In recent
years, the small size of the MOSFET, below a few tens of nanometers, has created operational problems.

Higher subthreshold conduction

As MOSFET geometries shrink, the voltage that can be applied to the gate must be reduced to maintain reliability.
To maintain performance, the threshold voltage of the MOSFET has to be reduced as well. As threshold voltage is
reduced, the transistor cannot be switched from complete turn-off to complete turn-on with the limited voltage swing
available; the circuit design is a compromise between strong current in the "on" case and low current in the "off"
case, and the application determines whether to favor one over the other. Subthreshold leakage (including
subthreshold conduction, gate-oxide leakage and reverse-biased junction leakage), which was ignored in the past,
now can consume upwards of half of the total power consumption of modern high-performance VLSI chips.[23] [24]
[25]
MOSFET 11

Increased gate-oxide leakage

The gate oxide, which serves as insulator between the gate and channel, should be made as thin as possible to
increase the channel conductivity and performance when the transistor is on and to reduce subthreshold leakage
when the transistor is off. However, with current gate oxides with a thickness of around 1.2 nm (which in silicon is
~5 atoms thick) the quantum mechanical phenomenon of electron tunneling occurs between the gate and channel,
leading to increased power consumption.
Insulators (referred to as high-k dielectrics) that have a larger dielectric constant than silicon dioxide, such as group
IVb metal silicates e.g. hafnium and zirconium silicates and oxides are being used to reduce the gate leakage from
the 45 nanometer technology node onwards. Increasing the dielectric constant of the gate dielectric allows a thicker
layer while maintaining a high capacitance (capacitance is proportional to dielectric constant and inversely
proportional to dielectric thickness). All else equal, a higher dielectric thickness reduces the quantum tunneling
current through the dielectric between the gate and the channel. On the other hand, the barrier height of the new gate
insulator is an important consideration; the difference in conduction band energy between the semiconductor and the
dielectric (and the corresponding difference in valence band energy) also affects leakage current level. For the
traditional gate oxide, silicon dioxide, the former barrier is approximately 8 eV. For many alternative dielectrics the
value is significantly lower, tending to increase the tunneling current, somewhat negating the advantage of higher
dielectric constant.

Increased junction leakage

To make devices smaller, junction design has become more complex, leading to higher doping levels, shallower
junctions, "halo" doping and so forth,[26] [27] all to decrease drain-induced barrier lowering (see the section on
junction design). To keep these complex junctions in place, the annealing steps formerly used to remove damage and
electrically active defects must be curtailed[28] increasing junction leakage. Heavier doping is also associated with
thinner depletion layers and more recombination centers that result in increased leakage current, even without lattice
damage.

Lower output resistance

For analog operation, good gain requires a

high MOSFET output impedance, which is
to say, the MOSFET current should vary
only slightly with the applied
drain-to-source voltage. As devices are
made smaller, the influence of the drain
competes more successfully with that of the
gate due to the growing proximity of these
two electrodes, increasing the sensitivity of
the MOSFET current to the drain voltage.
To counteract the resulting decrease in
MOSFET version of gain-boosted current mirror; M1 and M2 are in active mode,
output resistance, circuits are made more
while M3 and M4 are in Ohmic mode, and act like resistors. The operational
complex, either by requiring more devices, amplifier provides feedback that maintains a high output resistance
for example the cascode and cascade
amplifiers, or by feedback circuitry using operational amplifiers, for example a circuit like that in the adjacent figure.

Lower transconductance
The transconductance of the MOSFET decides its gain and is proportional to hole or electron mobility (depending on
device type), at least for low drain voltages. As MOSFET size is reduced, the fields in the channel increase and the
MOSFET 12

dopant impurity levels increase. Both changes reduce the carrier mobility, and hence the transconductance. As
channel lengths are reduced without proportional reduction in drain voltage, raising the electric field in the channel,
the result is velocity saturation of the carriers, limiting the current and the transconductance.

Interconnect capacitance
Traditionally, switching time was roughly proportional to the gate capacitance of gates. However, with transistors
becoming smaller and more transistors being placed on the chip, interconnect capacitance (the capacitance of the
metal-layer connections between different parts of the chip) is becoming a large percentage of capacitance.[29] [30]
Signals have to travel through the interconnect, which leads to increased delay and lower performance.

Heat production

The ever-increasing density of MOSFETs on an

integrated circuit creates problems of substantial
localized heat generation that can impair circuit
operation. Circuits operate slower at high temperatures,
and have reduced reliability and shorter lifetimes. Heat
sinks and other cooling methods are now required for
many integrated circuits including microprocessors.
Power MOSFETs are at risk of thermal runaway. As
their on-state resistance rises with temperature, if the
load is approximately a constant-current load then the
power loss rises correspondingly, generating further
heat. When the heatsink is not able to keep the
Large heatsinks to cool power transistors in a TRM-800 audio
temperature low enough, the junction temperature may
amplifier
rise quickly and uncontrollably, resulting in destruction
of the device.
In order to assist designers in the device selection process, a simulation tool such as ThermaSimTM can be used to
simulate in-circuit performance[31] .

Process variations
With MOSFETS becoming smaller, the number of atoms in the silicon that produce many of the transistor's
properties is becoming fewer, with the result that control of dopant numbers and placement is more erratic. During
chip manufacturing, random process variations affect all transistor dimensions: length, width, junction depths, oxide
thickness etc., and become a greater percentage of overall transistor size as the transistor shrinks. The transistor
characteristics become less certain, more statistical. The random nature of manufacture means we do not know
which particular example MOSFETs actually will end up in a particular instance of the circuit. This uncertainty
forces a less optimal design because the design must work for a great variety of possible component MOSFETs. See
process variation, design for manufacturability, reliability engineering, and statistical process control.[32]

Modeling challenges
Modern ICs are computer-simulated with the goal of obtaining working circuits from the very first manufactured lot.
As devices are miniaturized, the complexity of the processing makes it difficult to predict exactly what the final
devices look like, and modeling of physical processes becomes more challenging as well. In addition, microscopic
variations in structure due simply to the probabilistic nature of atomic processes require statistical (not just
deterministic) predictions. These factors combine to make adequate simulation and "right the first time" manufacture
difficult.
MOSFET 13

MOSFET construction

Gate material
The primary criterion for the gate material is that it is a good conductor. Highly-doped polycrystalline silicon is an
acceptable but certainly not ideal conductor, and also suffers from some more technical deficiencies in its role as the
standard gate material. Nevertheless, there are several reasons favoring use of polysilicon:
1. The threshold voltage (and consequently the drain to source on-current) is modified by the work function
difference between the gate material and channel material. Because polysilicon is a semiconductor, its work
function can be modulated by adjusting the type and level of doping. Furthermore, because polysilicon has the
same bandgap as the underlying silicon channel, it is quite straightforward to tune the work function to achieve
low threshold voltages for both NMOS and PMOS devices. By contrast, the work functions of metals are not
easily modulated, so tuning the work function to obtain low threshold voltages becomes a significant challenge.
Additionally, obtaining low-threshold devices on both PMOS and NMOS devices would likely require the use of
different metals for each device type, introducing additional complexity to the fabrication process.
2. The Silicon-SiO2 interface has been well studied and is known to have relatively few defects. By contrast many
metal–insulator interfaces contain significant levels of defects which can lead to Fermi-level pinning, charging, or
other phenomena that ultimately degrade device performance.
3. In the MOSFET IC fabrication process, it is preferable to deposit the gate material prior to certain
high-temperature steps in order to make better-performing transistors. Such high temperature steps would melt
some metals, limiting the types of metal that can be used in a metal-gate-based process.
While polysilicon gates have been the de facto standard for the last twenty years, they do have some disadvantages
which have led to their likely future replacement by metal gates. These disadvantages include:
1. Polysilicon is not a great conductor (approximately 1000 times more resistive than metals) which reduces the
signal propagation speed through the material. The resistivity can be lowered by increasing the level of doping,
but even highly doped polysilicon is not as conductive as most metals. In order to improve conductivity further,
sometimes a high-temperature metal such as tungsten, titanium, cobalt, and more recently nickel is alloyed with
the top layers of the polysilicon. Such a blended material is called silicide. The silicide-polysilicon combination
has better electrical properties than polysilicon alone and still does not melt in subsequent processing. Also the
threshold voltage is not significantly higher than with polysilicon alone, because the silicide material is not near
the channel. The process in which silicide is formed on both the gate electrode and the source and drain regions is
sometimes called salicide, self-aligned silicide.
2. When the transistors are extremely scaled down, it is necessary to make the gate dielectric layer very thin, around
1 nm in state-of-the-art technologies. A phenomenon observed here is the so-called poly depletion, where a
depletion layer is formed in the gate polysilicon layer next to the gate dielectric when the transistor is in the
inversion. To avoid this problem, a metal gate is desired. A variety of metal gates such as tantalum, tungsten,
tantalum nitride, and titanium nitride are used, usually in conjunction with high-k dielectrics. An alternative is to
use fully-silicided polysilicon gates, a process known as FUSI.
MOSFET 14

Insulator
As devices are made smaller, insulating layers are made thinner, and at some point tunneling of carriers through the
insulator from the channel to the gate electrode takes place. To reduce the resulting leakage current, the insulator can
be made thicker by choosing a material with a higher dielectric constant. To see how thickness and dielectric
constant are related, note that Gauss' law connects field to charge as:
,
with Q = charge density, κ = dielectric constant, ε0 = permittivity of empty space and E = electric field. From this
law it appears the same charge can be maintained in the channel at a lower field provided κ is increased. The voltage
on the gate is given by:

with VG = gate voltage, Vch = voltage at channel side of insulator, and tins = insulator thickness. This equation shows
the gate voltage will not increase when the insulator thickness increases, provided κ increases to keep tins /κ =
constant (see the article on high-κ dielectrics for more detail, and the section in this article on gate-oxide leakage).
The insulator in a MOSFET is a dielectric which can in any event be silicon oxide, but many other dielectric
materials are employed. The generic term for the dielectric is gate dielectric since the dielectric lies directly below
the gate electrode and above the channel of the MOSFET.

Junction design
The source-to-body and drain-to-body junctions are the object of much attention because of three major factors: their
design affects the current-voltage (I-V) characteristics of the device, lowering output resistance, and also the speed of
the device through the loading effect of the junction capacitances, and finally, the component of stand-by power
dissipation due to junction leakage.
The drain induced barrier lowering of the threshold
voltage and channel length modulation effects upon I-V
curves are reduced by using shallow junction
extensions. In addition, halo doping can be used, that
is, the addition of very thin heavily doped regions of
the same doping type as the body tight against the
junction walls to limit the extent of depletion
regions.[33]

The capacitive effects are limited by using raised

MOSFET showing shallow junction extensions, raised source and
source and drain geometries that make most of the drain and halo implant. Raised source and drain separated from gate
contact area border thick dielectric instead of silicon. by oxide spacers.
[34]

These various features of junction design are shown (with artistic license) in the figure.
Junction leakage is discussed further in the section increased junction leakage.
MOSFET 15

Other MOSFET types

Dual gate MOSFET

The dual gate MOSFET has a tetrode configuration, where both gates control the current in the device. It is
commonly used for small signal devices in radio frequency applications where the second gate is normally used for
gain control or mixing and frequency conversion.

FinFET

The Finfet, see figure to right, is a double gate device,

one of a number of geometries being introduced to
mitigate the effects of short channels and reduce
drain-induced barrier lowering.

Depletion-mode MOSFETs
There are depletion-mode MOSFET devices, which are
less commonly used than the standard
enhancement-mode devices already described. These
are MOSFET devices that are doped so that a channel A double-gate FinFET device.
exists even with zero voltage from gate to source. In
order to control the channel, a negative voltage is applied to the gate (for an n-channel device), depleting the
channel, which reduces the current flow through the device. In essence, the depletion-mode device is equivalent to a
normally closed (on) switch, while the enhancement-mode device is equivalent to a normally open (off) switch.[35]

Due to their low noise figure in the RF region, and better gain, these devices are often preferred to bipolars in RF
front-ends such as in TV sets. Depletion-mode MOSFET families include BF 960 by Siemens and BF 980 by Philips
(dated 1980s), whose derivatives are still used in AGC and RF mixer front-ends.

NMOS logic
n-channel MOSFETs are smaller than p-channel MOSFETs and producing only one type of MOSFET on a silicon
substrate is cheaper and technically simpler. These were the driving principles in the design of NMOS logic which
uses n-channel MOSFETs exclusively. However, unlike CMOS logic, NMOS logic consumes power even when no
switching is taking place. With advances in technology, CMOS logic displaced NMOS logic in the 1980s to become
the preferred process for digital chips.
MOSFET 16

Power MOSFET
Power MOSFETs have a different structure than the one presented
above.[36] As with all power devices, the structure is vertical and
not planar. Using a vertical structure, it is possible for the
transistor to sustain both high blocking voltage and high current.
The voltage rating of the transistor is a function of the doping and
thickness of the N-epitaxial layer (see cross section), while the
current rating is a function of the channel width (the wider the
channel, the higher the current). In a planar structure, the current
and breakdown voltage ratings are both a function of the channel
dimensions (respectively width and length of the channel), Cross section of a Power MOSFET, with square cells.
resulting in inefficient use of the "silicon estate". With the vertical A typical transistor is constituted of several thousand
cells
structure, the component area is roughly proportional to the
current it can sustain, and the component thickness (actually the
N-epitaxial layer thickness) is proportional to the breakdown voltage[37] .

It is worth noting that power MOSFETs with lateral structure are mainly used in high-end audio amplifiers and
high-power PA systems. Their advantage is a better behaviour in the saturated region (corresponding to the linear
region of a bipolar transistor) than the vertical MOSFETs. Vertical MOSFETs are designed for switching
applications[38] .

DMOS
DMOS stands for double-diffused metal–oxide–semiconductor. Most power MOSFETs are made using this
technology.

RHBD MOSFETs
Semiconductor sub-micrometer and nanometer electronic circuits are the primary concern for operating within the
normal tolerance in harsh radiation environments like space. One of the design approaches for making a
radiation-hardened-by-design (RHBD) device is Enclosed-Layout-Transistor (ELT). Normally, the gate of the
MOSFET surrounds the drain, which is placed in the center of the ELT. The source of the MOSFET surrounds the
gate. Another RHBD MOSFET is called H-Gate. Both of these transistors have very low leakage current with
respect to radiation. However, they are large in size and take more space on silicon than a standard MOSFET.
Newer technologies are emerging for smaller devices for cost saving, low power and increased operating speed. The
standard MOSFET is also becoming extremely sensitive to radiation for the newer technologies. A lot more research
works should be completed before space electronics can safely use RHBD MOSFET circuits of nanotechnology.
When radiation strikes near the silicon oxide region (STI) of the MOSFET, the channel inversion occurs at the
corners of the standard MOSFET due to accumulation of radiation induced trapped charges. If the charges are large
enough, the accumulated charges affect STI surface edges along the channel near the channel interface (gate) of the
standard MOSFET. Thus the device channel inversion occurs along the channel edges and the device creates
off-state leakage path, causing device to turn on. So the reliability of circuits degrades severely. The ELT offers
many advantages. These advantages include improvement of reliability by reducing unwanted surface inversion at
the gate edges that occurs in the standard MOSFET. Since the gate edges are enclosed in ELT, there is no gate oxide
edge (STI at gate interface), and thus the transistor off-state leakage is reduced very much.
Low-power microelectronic circuits including computers, communication devices and monitoring systems in space
shuttle and satellites are very different than what we use on earth. They are radiation (high-speed atomic particles
like proton and neutron, solar flare magnetic energy dissipation in earth's space, energetic cosmic rays like X-ray,
MOSFET 17

Gamma-ray etc.) tolerant circuits. These special electronics are designed by applying very different techniques using
RHBD MOSFETs to ensure the safe space journey and also space-walk of astronauts.

MOSFET analog switch

MOSFET analog switches use the MOSFET channel as a low–on-resistance switch to pass analog signals when on,
and as a high impedance when off. Signals flow in both directions across a MOSFET switch. In this application the
drain and source of a MOSFET exchange places depending on the voltages of each electrode compared to that of the
gate. For a simple MOSFET without an integrated diode, the source is the more negative side for an N-MOS or the
more positive side for a P-MOS. All of these switches are limited on what signals they can pass or stop by their
gate-source, gate-drain and source-drain voltages, and source-to-drain currents; exceeding the voltage limits will
potentially damage the switch.

Single-type MOSFET switch

This analog switch uses a four-terminal simple MOSFET of either P or N type. In the case of an N-type switch, the
body is connected to the most negative supply (usually GND) and the gate is used as the switch control. Whenever
the gate voltage exceeds the source voltage by at least a threshold voltage, the MOSFET conducts. The higher the
voltage, the more the MOSFET can conduct. An N-MOS switch passes all voltages less than (Vgate–Vtn). When the
switch is conducting, it typically operates in the linear (or Ohmic) mode of operation, since the source and drain
voltages will typically be nearly equal.
In the case of a P-MOS, the body is connected to the most positive voltage, and the gate is brought to a lower
potential to turn the switch on. The P-MOS switch passes all voltages higher than (Vgate+|Vtp|). Threshold voltage
(Vtp) is typically negative in the case of P-MOS.
A P-MOS switch will have about three times the resistance of an N-MOS device of equal dimensions because
electrons have about three times the mobility of holes in silicon.

Dual-type (CMOS) MOSFET switch

This "complementary" or CMOS type of switch uses one P-MOS and one N-MOS FET to counteract the limitations
of the single-type switch. The FETs have their drains and sources connected in parallel, the body of the P-MOS is
connected to the high potential (VDD) and the body of the N-MOS is connected to the low potential (Gnd). To turn
the switch on the gate of the P-MOS is driven to the low potential and the gate of the N-MOS is driven to the high
potential. For voltages between (VDD–Vtn) and (Gnd+Vtp) both FETs conduct the signal, for voltages less than
(Gnd+Vtp) the N-MOS conducts alone and for voltages greater than (VDD–Vtn) the P-MOS conducts alone.
The only limits for this switch are the gate-source, gate-drain and source-drain voltage limits for both FETs. Also,
the P-MOS is typically three times the width of the N-MOS so the switch will be balanced.
Tri-state circuitry sometimes incorporates a CMOS MOSFET switch on its output to provide for a low ohmic, full
range output when on and a high ohmic, mid level signal when off.
MOSFET 18

See also
• BSIM
• Transistor models

Literature
• Dr. Ulrich Nicolai, Dr. Tobias Reimann, Prof. Jürgen Petzoldt, Josef Lutz: Application Manual IGBT and
MOSFET Power Modules, 1. Edition, ISLE Verlag, 1998, ISBN 3-932633-24-5 PDF-Version [39]

External links
• An introduction to depletion-mode MOSFETs [40]
• Power MOSFETs [41]
• MOSFET Process Step by Step [42] A Flash slide showing the fabricating process of a MOSFET in detail step
• MOSFET Calculator [43] MOSFET Calculator
• Advanced MOSFET Issues [44]
• MOSFET applet [45] Very nice applet that helps to understand MOSFET.
• MIT OpenCourseWare courses:
• MIT Open Courseware 6.002 - Spring 2007 [46] -- Link to the intro electrical engineering course at MIT on
circuits and electronics.
• MIT Open Courseware 6.012 - Fall 2005 [47] -- Link to a more advanced class taught at MIT all about
microelectronics and MOSFETs
• Georgia Tech BJT and FET Slides [48] Slides from a Microelectronic Circuits class at Georgia Tech
• CircuitDesign: MOS Diffusion Parasitics [49] Crude illustrations of MOS diffusion structure and sample circuit
layouts to minimize their parasitics
• Course on Physics of Nanoscale Transistors [50]
• Notes on Ballistic MOSFETs by Dr. Lundstrom [51] nice resource to understand theory of ballistic MOSFETs.

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MOSFET 20

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Article Sources and Contributors 21

Article Sources and Contributors

MOSFET  Source: http://en.wikipedia.org/w/index.php?oldid=386712839  Contributors: A.Kurtz, Ace of Risk, AdShea, Adam1213, Adamrush, Adams13, Adma84, Adpete, Alai, Alansohn,
Alexius08, Altenmann, Alureiter, Amir buet, Andonic, Angryknome94, Anoopm, Argon233, Armstrong1113149, Arnero, ArséniureDeGallium, Beatnik8983, Benandorsqueaks, Bhadani, Biezl,
Bittermand, Blixtra.org, Bobo192, Bodnotbod, Brews ohare, Brim, Camrn86, Caragpietro, Ccrrccrr, Chowbok, Cmdrjameson, Congruence, Cpl Syx, Cxw, Cyferz, CyrilB, DARTH SIDIOUS 2,
Daisydaisy, Daniel Christensen, Dark Enigma, Dash69, Dbroadwell, Dftb, Dgies, Dicklyon, Donarreiskoffer, Duk, Dysprosia, Ejay, EleanorRugby, Electron9, EncMstr, Enum, Foobaz, Fred the
Oyster, Fuhghettaboutit, Gdo01, Gene Nygaard, Ghost.b88, Givegains, Glenn, GoingBatty, Gorotdi, Gsjonesii, Gustengren, Hillbrand, Hooperbloob, HorsePunchKid, II MusLiM HyBRiD II,
Ianis G. Vasilev, Inbamkumar86, InvertRect, J. Finkelstein, J.delanoy, JForget, Jaan513, Jaganath, Jaraalbe, Jasonlor, Jcmaco, Jeff3000, Jkl, Jmn100, John, John2kx, JohnCD, Jordsan, Jp314159,
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Image Sources, Licenses and Contributors

Image:D2PAK.JPG  Source: http://en.wikipedia.org/w/index.php?title=File:D2PAK.JPG  License: Creative Commons Attribution-Sharealike 2.5  Contributors: CyrilB, Geofrog, Inductiveload,
Tothwolf, 1 anonymous edits
File:MOSFET functioning body.svg  Source: http://en.wikipedia.org/w/index.php?title=File:MOSFET_functioning_body.svg  License: GNU Free Documentation License  Contributors:
User:Biezl
Image:Threshold formation.gif  Source: http://en.wikipedia.org/w/index.php?title=File:Threshold_formation.gif  License: Public Domain  Contributors: Saumitra R Mehrotra & Gerhard
Klimeck
Image:MOSFETs.jpg  Source: http://en.wikipedia.org/w/index.php?title=File:MOSFETs.jpg  License: Public Domain  Contributors: Original uploader was Dicklyon at en.wikipedia
Image:JFET P-Channel Labelled.svg  Source: http://en.wikipedia.org/w/index.php?title=File:JFET_P-Channel_Labelled.svg  License: Public Domain  Contributors: jjbeard
Image:IGFET P-Ch Enh Labelled.svg  Source: http://en.wikipedia.org/w/index.php?title=File:IGFET_P-Ch_Enh_Labelled.svg  License: Public Domain  Contributors: jjbeard
Image:IGFET P-Ch Enh Labelled simplified.svg  Source: http://en.wikipedia.org/w/index.php?title=File:IGFET_P-Ch_Enh_Labelled_simplified.svg  License: unknown  Contributors:
User:Omegatron
Image:Mosfet P-Ch Sedra.svg  Source: http://en.wikipedia.org/w/index.php?title=File:Mosfet_P-Ch_Sedra.svg  License: Creative Commons Attribution-Sharealike 3.0  Contributors:
User:Omegatron, User:Pfalstad
Image:IGFET P-Ch Dep Labelled.svg  Source: http://en.wikipedia.org/w/index.php?title=File:IGFET_P-Ch_Dep_Labelled.svg  License: Public Domain  Contributors: jjbeard
Image:JFET N-Channel Labelled.svg  Source: http://en.wikipedia.org/w/index.php?title=File:JFET_N-Channel_Labelled.svg  License: Public Domain  Contributors: jjbeard
Image:IGFET N-Ch Enh Labelled.svg  Source: http://en.wikipedia.org/w/index.php?title=File:IGFET_N-Ch_Enh_Labelled.svg  License: Public Domain  Contributors: Cepheiden, Deadstar,
Jjbeard, Zedh, 4 anonymous edits
Image:IGFET N-Ch Enh Labelled simplified.svg  Source: http://en.wikipedia.org/w/index.php?title=File:IGFET_N-Ch_Enh_Labelled_simplified.svg  License: unknown  Contributors:
User:Omegatron
Image:Mosfet N-Ch Sedra.svg  Source: http://en.wikipedia.org/w/index.php?title=File:Mosfet_N-Ch_Sedra.svg  License: Creative Commons Attribution-Sharealike 3.0  Contributors:
User:Omegatron, User:Pfalstad
Image:IGFET N-Ch Dep Labelled.svg  Source: http://en.wikipedia.org/w/index.php?title=File:IGFET_N-Ch_Dep_Labelled.svg  License: Public Domain  Contributors: jjbeard
Image:mosfet n-ch circuit.svg  Source: http://en.wikipedia.org/w/index.php?title=File:Mosfet_n-ch_circuit.svg  License: Creative Commons Attribution-Sharealike 3.0  Contributors:
User:Electron9, User:Fred the Oyster
Image:MOS Capacitor.svg  Source: http://en.wikipedia.org/w/index.php?title=File:MOS_Capacitor.svg  License: GNU Free Documentation License  Contributors: User:Brews ohare, User:Fred
the Oyster
Image:N-channel enhancement-type MOSFET.svg  Source: http://en.wikipedia.org/w/index.php?title=File:N-channel_enhancement-type_MOSFET.svg  License: Public Domain  Contributors:
User:Fred the Oyster, User:Hermitage17
Image:N-channel mosfet.svg  Source: http://en.wikipedia.org/w/index.php?title=File:N-channel_mosfet.svg  License: Public Domain  Contributors: User:Fred the Oyster, User:Hermitage17
Image:IvsV mosfet.png  Source: http://en.wikipedia.org/w/index.php?title=File:IvsV_mosfet.png  License: GNU Free Documentation License  Contributors: CyrilB, WikipediaMaster, 1
anonymous edits
Image:Mosfet linear.svg  Source: http://en.wikipedia.org/w/index.php?title=File:Mosfet_linear.svg  License: Creative Commons Attribution-Sharealike 2.5  Contributors: User:CyrilB
Image:Mosfet saturation.svg  Source: http://en.wikipedia.org/w/index.php?title=File:Mosfet_saturation.svg  License: Creative Commons Attribution-Sharealike 2.5  Contributors: Cepheiden,
CyrilB, WikipediaMaster
Image:MOSFET functioning.svg  Source: http://en.wikipedia.org/w/index.php?title=File:MOSFET_functioning.svg  License: GNU Free Documentation License  Contributors: Olivier Deleage
and Peter Scott
Image:Intel gate length trend.PNG  Source: http://en.wikipedia.org/w/index.php?title=File:Intel_gate_length_trend.PNG  License: Creative Commons Attribution-Sharealike 3.0  Contributors:
Naturalion, 1 anonymous edits
Image:WIde-swing MOSFET mirror.PNG  Source: http://en.wikipedia.org/w/index.php?title=File:WIde-swing_MOSFET_mirror.PNG  License: GNU Free Documentation License
 Contributors: User:Brews ohare
File:Transistor.jpg  Source: http://en.wikipedia.org/w/index.php?title=File:Transistor.jpg  License: Creative Commons Attribution 3.0  Contributors: User:Daniel Christensen
Image:MOSFET junction structure.png  Source: http://en.wikipedia.org/w/index.php?title=File:MOSFET_junction_structure.png  License: GNU Free Documentation License  Contributors:
User:Brews ohare
Image:Doublegate FinFET.PNG  Source: http://en.wikipedia.org/w/index.php?title=File:Doublegate_FinFET.PNG  License: GNU Free Documentation License  Contributors: Original uploader
was Irene Ringworm at en.wikipedia
Image:Power mos cell layout.svg  Source: http://en.wikipedia.org/w/index.php?title=File:Power_mos_cell_layout.svg  License: GNU Free Documentation License  Contributors: Cyril
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License
Creative Commons Attribution-Share Alike 3.0 Unported
http:/ / creativecommons. org/ licenses/ by-sa/ 3. 0/