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"Design, modeling and control of a modular contactless wafer handling system."

Bassem Dahroug et al. (2015)

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DOI: 10.1109/ICRA.2015.7139295

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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  - conf/icra/DahrougLGF15
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  - https://dblp.org/rec/conf/icra/DahrougLGF15
Bassem Dahroug, Guillaume J. Laurent, Valérian Guelpa, Nadine Le Fort-Piat:
Design, modeling and control of a modular contactless wafer handling system. ICRA 2015: 976-981

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