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Your search: "author:Denbeaux, Gregory"

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Article

Extreme Ultraviolet Phase Contrast Imaging

Denbeaux, Gregory;
Garg, Rashi;
Aquila, Andy;
Barty, Anton;
Goldberg, Kenneth;
Gullikson, Eric;
Liu, Yanwei;
Wood, Obert

LBL Publications (2008)

Cover page: Extreme Ultraviolet Phase Contrast Imaging

Article

Experimental analysis of high-resolution soft x-ray microscopy

Chao, Weilun;
Anderson, Erik H.;
Denbeaux, Gregory;
Harteneck, Bruce;
Pearson, Angelic L.;
Olynick, Deirdre;
Schneider, Gerd;
Attwood, David

Lawrence Berkeley National Laboratory (2001)

Cover page: Experimental analysis of high-resolution soft x-ray microscopy

Article

Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects:

Upadhyaya, Mihir;
Basavalingappa, Adarsh;
Herbol, Henry;
Denbeaux, Gregory;
Jindal, Vibhu;
Harris-Jones, Jenah;
Jang, Il-Yong;
Goldberg, Kenneth A.;
Mochi, Iacopo;
Marokkey, Sajan;
Demmerle, Wolfgang;
Pistor, Thomas V.

LBL Publications (2017)

Cover page: Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects:

Article

Cross-sectional film characterization of exposure-induced carbon contamination on patterned EUV masks

Fan, Yu-Jen;
Yankulin, Leonid;
Antohe, Alin;
Thomas, Petros;
Garg, Rashi;
Mbanaso, Chimaobi;
Khopkar, Yashdeep;
Murray, Thomas;
Wuest, Andrea;
Goodwin, Frank;
Naulleau, Patrick;
Goldberg, Kenneth A.;
Mochi, Iacopo;
Gullikson, Eric;
Anderson, Erik;
Salmassi, Farhad;
Denbeaux, Gregory

LBL Publications (2010)

Cover page: Cross-sectional film characterization of exposure-induced carbon contamination on patterned EUV masks

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