123 results about "Plate wave" patented technology

An elastic wave device includes a support layer with a through-hole or a recess opened at an upper surface thereof, a piezoelectric thin film arranged on the support layer to extend above the recess or the through-hole of the support layer, and an IDT electrode defined on at least one of upper and lower surfaces of the piezoelectric thin film in a region of the piezoelectric thin film, the region extending above the recess, or the through-hole. A secondary mode of a plate wave, which contains a U1 component as a main component, is utilized. The piezoelectric thin film is made of LiTaO3, and Euler angles (φ, θ, ψ) of the LiTaO3 fall within specific ranges.

The invention relates to a surface acoustic wave (Surface Acoustic Wave, SAW) device on the basis of a flexible substrate and a preparation method thereof. The SAW device comprises a substrate, a bottom electrode layer, a piezoelectric layer and a top electrode layer. A working area is formed by the bottom electrode layer, the piezoelectric layer and the top electrode layer. The SAW device is characterized in that the flexible substrate is arranged below the bottom electrode layer; and the flexible substrate is provided with an opening. The SAW device and the preparation method thereof have the characteristics that 1, due to the adoption of the flexible substrate, the obtained device is light, can be mounted on a curved surface, can be continuously produced in a roll-to-roll mode, and has simple manufacturing process and low cost; and 2, the flexible substrate is subjected to reverse side body deep etching to form the opening so that sound waves are spread in the piezoelectric layer in a plate wave mode, a high resonant frequency can be obtained, and meanwhile, the energy of the sound waves is limited in the working area so that a high device Q value can be obtained. Moreover, when a plate wave mode resonator is applied to a liquid sensor, the Q value cannot be reduced due to the radiation of the energy into the liquid.

A flexural plate wave sensor including a flexural plate having a length and a width and a comb pattern over the flexural plate with drive teeth disposed across the entire length of the flexural plate to reduce the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexure plate wave sensor.

An ultrasonic wave propagating method capable of propagating plate waves between a probe and a test piece despite variations in the thickness or the surface angle of a test piece, and an ultrasonic propagating device and an ultrasonic testing device using this method. Ultrasonic waves are propagated between a probe (20) for transmitting or receiving ultrasonic waves and a test piece (100) for propagating plate waves. When propagating ultrasonic waves, a probe that can set an ultrasonic wave incident angle from the probe (20) to the test piece (100) and / or an ultrasonic wave receivable angle from the test piece to the probe in a plurality of states is used. A focal point type probe may be used as the above probe (20). When this type of a probe is used, it is oriented such that an oscillating direction axis L1 in the direction of which a reference axis along the propagation route of ultrasonic waves is oscillated around the focal point of the probe crosses the propagation element surface L2 including the test piece surface of a ultrasonic wave propagation element.