Training module

This document is ASML Confidential

Configuration: Document ID: Issue date:

TwinScan XT rev2 TT-L2-RS, version 3v0 9/12/2006
3.5.2
Module ID: Status:
TT-L2-RS-3v0 Provisional

LEVEL 2 PERIODIC MAINTENANCE

TRAINING- SCANNING RETICLE
STAGE
FOR TRAINING PURPOSES ONLY

ASML Confidential - This document is provided for employees of ASML and for selected employees of ASML's customers
and agents, in order to assist them in efficient use of ASML products. The document must not be disclosed to third parties.
 ii About this module TT-L2-RS-3v0

COPYRIGHT © 2006, ASML Holding N.V. (including affiliates). All rights reserved.
This publication is subject to change without notice and contains confidential and
proprietary information of ASML Holding N.V. or its affiliates (“ASML”).
This documentation is for the intended purpose only and for the use of the intended
recipient only. Please retain control of this documentation. It is not to be forwarded or
distributed. Any unauthorized review, copying, use, disclosure or distribution is strictly
prohibited. The material herein is provided “AS-IS” AND ASML makes no warranty of
any kind with regard to this material. ASML shall not be liable for errors and
omissions contained herein.

Trademarks AS ML, ASM Lithography, TW INSCAN, MAS KRIGGER, MAS KWEA VER,
LITHOCRUISER, ATHENA, QUASAR, IRIS, MICRALIGN, PAS 5500, PAS 5000,
3DAlign, 2DStitching, 3DMetrology, and the ASML logo are trademarks of ASML
Holding N.V. or affiliate companies. The trademarks may be used either alone or in
combination with a further product designation.

Starlith and Aerial are trademarks of Carl Zeiss.

Nothing in this publication is intended to make representations with regard to whether

any trademark is registered or to suggest that any sign other than those mentioned
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should not be considered to be a trademark of ASML or of any third party.

ASML Confidential
 iv About this module TT-L2-RS-3v0

ABOUT THIS MODULE TT-L2-RS-3V0

MODULE INTRODUCTION

The reticle stage subsystem is a completely independent subsystem that is mounted

inside the exposure unit. Scanning synchronization, interactions with other sub-
systems, and calibrations and testing are handled by various software programs.

GENERAL MODULE INFORMATION

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Objectives Upon successful completion of the module, you are able to:
• Identify safety considerations related to reticle stage maintenance
• Locate and identify the reticle stage and component parts
• List the functions of the reticle stage and component parts
• Prepare the reticle stage for maintenance
• Remove and install reticle stage covers
• Clean reticle support surfaces
• Measure cable duct clearance

Test Given access to an ASML Twin Scan system and the appropriate tools, you will
perform selected periodic maintenance procedures as listed in ASML Coach
documentation, under the supervision of an instructor.

Prerequisites Level One Certification complete

Additional Materials
 About this module TT-L2-RS-3v0 v

SAFETY

Safety related items are indicated in this manual by:

• A pictogram
• A description that tells how serious the danger is and any actions necessary to
prevent it
The three levels in safety are:
• Danger, shows a very dangerous situation that, if not prevented, could result in
death or a very serious injury
• Warning, shows a dangerous situation where there is a risk of serious injury
• Caution, shows that equipment or property could be damaged or there is a risk of
minor injury
Before you install, operate or maintain the system, read the applicable safety manual.
There is a safety manual for each system.

Definition of The following pictograms are used in ASML equipment:

pictograms

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General hazard Electrostatic Laser radiation UV radiation Electrical hazard
damage

Flammable Toxic hazard Chemical Hot surface(s) Sharp object(s)

substance hazard

Strong magnetic Lifting heavy Trapping by Moving heavy Radio frequency

field(s) object(s) moving parts object(s) radiation

General warnings
Warning All forms of operation, installation work, maintenance, repair, modification and all
other activities involving the different systems must only be carried out by authorized,
fully qualified personnel.
Warning Only personnel who have received ASML maintenance training are allowed to open
system covers.
Warning All safety and other requirements described in ASML manuals, the applicable
contracts and the law must be observed at all times.
Warning Use of controls or adjustments or performance of procedures other than those
specified in ASML manuals may result in hazardous radiation exposure.
 vi About this module TT-L2-RS-3v0

Warning The mains power switch can be locked off during maintenance. Lockout/tagout
procedures should be according to local fab standards. In the U.S.A. these
procedures must conform to OSHA standard 1910.147.
Warning During maintenance, all machine operating control points must be tagged to prevent
accidental operation.
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 Table of Contents i

Chapter 1 Scanning Reticle Stage

Major Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Component Introduction 6
Long Stroke Module 6
Short Stroke Module 10
Short Stroke Module position Sensors 13
Support Units 19
Service Module 21
Electronics Cabinets 22

Chapter 2 Procedures
Prepare Reticle Stage For Maintenance . . . . . . . . . . . . . . . . . . . . . . . . 26
Remove & Install Reticle Stage covers (top covers only). . . . . . . . . . 28
Clean Reticle Support Surfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Measure Cable Duct Clearance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Check The Stage Performance (Wafer or Reticle Stage) . . . . . . . . . . 32

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Appendix A Scanning Reticle Stage Chuck Type 2 (with encoder) . . . . . . . . . . . . . 1
Major Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Module Components 5
Long Stroke Module 7
Short Stroke Module 11
Scanning Reticle Stage Support Modules 15
Electronics Cabinets 17
Service Module 17
Short Stroke Module Type-2 (with encoder system) Position Sensors 18

Appendix B Scanning Reticle Stage Chuck Type 1 (& Type2 with IFM) . . . . . . . . . 1
Major Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Module Components 4
Long Stroke Module 6
Short Stroke Module 9
Scanning Reticle Stage Support Modules 13
Electronics Cabinets 15
Service Module 16
Short Stroke Module Type-1 (and Type-2 with Interferometer system) Position Sensors 16
 ii Table of Contents
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 1
SCANNING RETICLE STAGE

INTRODUCTION

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Figure 1.1 Reticle Stage Subsystem

The reticle stage subsystem is a completely independent subsystem mounted inside

the exposure unit. Scanning synchronization, interactions with other subsystems, and
calibrations and testing are handled by various software programs. The stage
consists of electro-mechanical components that scan the reticle in the Y (front to back
in the exposure unit) at a four to one ratio to the wafer stage; a function of the 4X
projection lens reduction. The reticle is also controlled in vertical (Z), left to right (X),
and rotation around vertical (Rz) to assure accurate placement of the image.

Safety devices, cooling, vacuum for reticle clamping, compressed gas, electrical
supplies and control electronics are all supported by subsystems located appropriate
for the specific function.

Reticle Stage Functions

1. move chuck to reticle exchange position
2. clamp reticle on transfer from turret
3. move reticle to expose position above lens
4. position reticle for alignment and exposure
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5. transport the reticle to reticle exchange position and transfer back to turret

Reticle Stage Location

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Figure 1.2 Reticle Stage

The reticle stage is located near the center of the Twinscan exposure unit, above the
projection lens and below the illumination top module.

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MAJOR COMPONENTS

Location of the major components is shown in Figure 1.3

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Figure 1.3 Reticle Stage major component locations.

The Reticle Stage module is located in the Twinscan Exposure Unit, the controlling
and power electronics are located in two different electronics cabinets, one in the
Exposure Unit and one separate cabinet in the sub-fab. Two water cabinets, which
are not part of the Reticle Stage system but supporting it, are located in the sub-fab
as well.

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Figure 1.4 Reticle Stage components

The location and naming of the Reticle Stage Module components and supporting
components are shown in Figure 1.4.

Long Stroke Module

– provides movement of the Short Stroke module in Y with micrometer
accuracy.

Short Stroke module

– used to house the reticle chuck and its actuators. The actuators allow the
chuck to be manipulated in all six degrees of freedom with nanometer
accuracy.
– the chuck holds the Reticle

Short Stroke Module position sensors

– Sensors used by Short Stroke Module to position 6 DOF.

Support Units
– both system electronics and pneumatics are support units for the reticle
stage.

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Service Unit
– sits below the Reticle Stage on the system base frame. It has the capability
of lifting the reticle stage off the system base frame and shifting it out to the
left side of the machine for maintenance or repair

Electronics cabinets
– The exposure unit ELEctronics Cabinet (ELEC) contains two racks providing
control and data processing
– Reticle Stage Remote Cabinet (RSRC) provides necessary power for the
Reticle Stage motors

Water Cabinets
– Both the Motor Circuit Water Cabinet and the Lens Circuit Water Cabinets
supply water to cool the Reticle Stage motors
– Those cabinets will be discussed in the Layout section of the Level 2
training

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Component Introduction
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Figure 1.5 Reticle Stage Module

The Reticle Stage Module is build on a Reticle Stage Module Frame, this
frame interfaces to the Base Frame of the Twinscan system.
All components as visible in Figure 1.5 will be discussed in the next para-
graphs.

Long Stroke Module

The Long Stroke Module (LoS) positions the Short Stroke Module (SS) for load/
unload, alignment, and exposure. It includes the y-unit frames, balance masses, and
Long Stroke Slides. It provides long Y direction motions of the SS module

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Figure 1.6 Long Stroke Module

Figure 1.7 Long Stroke Components

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The long stroke module contains the following components:

• Two y-unit frames
• Two balance masses
• Two long stroke slides

Y- Unit frames
Two Y unit frames (one on each side of the reticle stage) support the Balance Mass
assembly on air bearings. They contain the Balance Mass motors (motor coils) and
the position encoder sensor (used to measure the Balance Mass position with
respect to the Y-unit Frame).
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Figure 1.8 Y-Unit frame

Balance Masses
The balance rides on air-bearing surfaces located on the Y-unit frame. The balance

Figure 1.9 Balance Masses

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counteracts large forces generated during scanning by moving freely in the opposite
direction of the long stroke slides.
Both the magnets for the LoS motors and the magnets for the Balance Mass motor
reside on the Balance Mass (the LoS motor coils are located in the Long stroke slide
assembly).
The optical encoder ruler for the Balance Mass position and the optical encoder ruler
for the Long Stroke position are located on the Balance Mass.
The Balance mass also has the air-bearing surfaces for the Long Stroke slide
assembly.

Long Stroke Slides

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Figure 1.10 Long Stroke Slide

The long stroke slide serves as a mechanical interface between the long stroke
module and the short stroke module. The slides allow the long stroke module to move
the short stroke module (including chuck and reticle) the distance required to expose
an image, access reticle stage fiducials, and exchange reticles.
The long stroke slide houses the coils for the long stroke motor, also cooling water
lines are routed towards the motor coils.
The position encoder sensor (used to measure the LoS slide position with respect to
the Balance Mass) are also located on the long stroke slide.
The long stroke slide floats with an air cushion on the balance mass. They are
positioned in parallel on the right and left side of the short stroke module.
Figure 1.10 also shows the locations of:
Cable Duct Interfaces for cable ducts that supply the system electronics, water, and
pneumatics.
Airbearings that support the Long Stroke in X and Z direction
Z-interface supports the Reticle stage short stroke module in Z, Ry, and Rx.
X/Y-interface supports the Reticle stage short stroke module in X,Y, and Rz.
Long Stroke Motor locking plate locks the reticle stage long stroke slide to the Y-
unit when the reticle stage is in the reticle exchange position.

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Short Stroke Module

The Short Stroke Module positions the reticle stage chuck for exposure, load,
and alignment. It is called the short stroke because its range of motion is very small.
The Short Stroke Module includes a Shorts Stroke Module Frame, Actuators
for X, Y, and Z motion, and the Reticle Clamping Chuck.
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Figure 1.11 Reticle Stage Short Stroke Module

Short Stroke Frame

The Short Stroke Frame acts as an interface between the reticle stage chuck and the
long stroke slides. The short stroke frame supports the reticle stage chuck, but does
not physically touch any of the reticle stage chuck components. The frame supports
the coils used in the X and Y Short Stroke Motors, and the reticle stage chuck Z-
actuators. These units work together to manipulate the chuck in all six degrees of
freedom.
Connections for cooling water, and for air and vacuum, are also located on the frame.
The water is routed through the motors to dissipate actuator heat build up. The air
and vacuum are routed through the frame to the chuck.

Actuators
The X,Y and Z actuators are Lorentz motors. By design, they contain magnets and
coils with no physical connection, allowing controlled motion while maintaining the
silent world. The actuators position the chuck in X, Y, and Z for expose, alignment,
and exchange. The X and Y actuators position the Reticle Chuck horizontally in 3
degrees of freedom (X,Y, and Rz). The 3 Z actuators position the chuck
vertically in the other 3 degrees of freedom (Z, Rx, and Ry).

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X/Y Actuators
The X/Y actuator system manipulates the reticle chuck in the horizontal plane, i.e.
three degrees of freedom, X,Y, and Rz. Three Lorentz actuators, two for Y direction
and one for X, perform this task. The lack of physical contact between the two parts
eliminates noise transfer to the silent world of the reticle stage. The actuator magnets
are attached to the chuck and the coils are attached to the short stroke frame.

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Figure 1.12 X/Y Actuators

Z-Actuators/Gravity Compensators

Figure 1.13 Z-actuators / Gravity Compensators

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Three Z-actuators manipulate the reticle stage chuck in three vertical degrees of
freedom: Z, Rx, and Ry. Lorentz actuators in conjunction with a gravity compensation
system achieve this motion.
The gravity compensators support most the weight of the chuck allowing the Z-
actuators to use less current. Gravity compensators lift most of the weight of the
chuck with the Lorentz motors making small rapid corrections, allowing smaller
motors, increasing responsiveness, and decreasing generated heat.
An integrated Z-actuator design uses a magnetic gravity compensator along with a
Lorentz Motor for Z motion. The gravity compensator consists of static magnets to
support most of the weight of the chuck. The interaction between these magnets and
the magnets of the Lorentz motors create the gravity compensation.

Reticle Stage Chuck

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Figure 1.14 Reticle Stage Chuck

The reticle stage chuck vacuum clamps the reticle during exposure and exchange
sequences. It is constructed from a single block of Zerodur to minimize thermal
effects.
An encoder system measures chuck X and Y position using scales glued to the edge
of the chuck and an encoder reader mounted on the top of the lens.
Part of the reticle stage chuck are a TIS and ILIAS fiducial plate, those plates are
used to perform alignment measurements and metrology calibrations (those items
will be discussed in the training modules for TIS/ILIAS and Metrology).
Crash buffers at the corners of the reticle area prevent damage to the reticle in case
the clamping vacuum fails.
The reticle stage chuck is supported by the short stroke frame, but does not
physically touch any of the reticle stage chuck components. The gravity
compensation system separates the reticle stage chuck from the Short Stroke
module.

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Short Stroke Module position Sensors

• Short Stroke Encoder
– Determines Chuck position horizontally (X, Y, Rz)
– Determines zero position with respect to lens
• Z- Capacitive Sensor
– Determines Height and Tilt of Chuck to lens (Z, Ry, and Rx)
• Difference Sensor
– Measures position of Chuck with respect to Short Stroke Module, provides
controlling signal to Long Stroke Module (X, Y)
• Load Sensor
– Determines the position of the chuck when loading a reticle (X, Y)
• Z-Difference Sensor
– Maintains Z-position of reticle chuck in the load position (Z, Rx, Ry)

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Short Stroke Encoder

The Reticle Stage Encoder system consists of 2 Y-encoders and 1 X-encoder. The

Figure 1.15 RS encoder scales (left) & RS encoder heads (right)

encoder heads are mounted on the lens top and the scales are mounted on the
Reticle Stage.
The encoder heads are connected with optical fibers to the encoder boards in the
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Figure 1.16 Scanning Reticle Stage Encoder Measurement System

Interferometer System Rack (IFSR). Using the three encoders, the system can
measure the chuck position in X, Y, and Rz with respect to the lens. The Encoders
scales have index marks that determine the zero position for the encoder
measurement system.

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 For training purposes only Chapter 1 15

Z-Capacitive Sensors
The Z-capacitive sensor system is comprised of four Z-capacitive sensors, mounted

Figure 1.17 Z- Capacitive Sensors hardware

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on top of the lens.On the bottom of the Reticle Chuck are four metallic strips. The
sensors measure the distance between the sensors and the metallic strips, which
represents reticle stage Z, Rx and Ry with respect to the lens.
The Z-capacitive sensors are connected to a Z-capacitive sensor board in the IFSR.

Figure 1.18 Z- Capacitive Sensors overview

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Difference Sensors
Difference Sensors measure the position of the Chuck with respect to the Short

Figure 1.19 Difference Sensor Locations

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Stroke Frame. The combination of a magnet attached at the Chuck and a sensor
attached to the short stroke frame creates a diff sensor. Three diff sensors are
implemented, one X and two Y sensors, together they provide X, Y, Rz position
feedback.
Diff sensor control is required to position the reticle chuck when the Encoder system
is not active yet (before zeroing the encoder system) and to control position when out
of Encoder sensor range during reticle exchange.
The diff sensors are also needed as feedback for the long stroke motors in this way
the long stroke motors can “follow” the short stroke module when moving.
When the short stroke motor receives a new setpoint, the Lorentz motors move
the reticle chuck. The Y-diff sensors will detect the motion and this will drive the
long stroke motors. When the chuck reaches the desired location, the Y-diff
sensors return to center position, so the long stroke motors stop driving.

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Load Sensor
When the Reticle stage moves to the reticle load position it is out of chuck encoder

Figure 1.20 Load Sensor Location

control and on baseframe coordinate control. This means the position of the reticle

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stage chuck is controlled by the summation of the Balance Mass encoder value with
the Long Stroke encoder value and the Chuck Difference sensor value.
During loading of the reticle the chuck position must be controlled accurate with
respect to the top of the lens, this to assure accurate positioning of the reticle in the
chuck. To achieve this the load sensors are used.
The load sensors are mounted on the lens top and magnets are mounted at the side
of the reticle chuck. When the chuck is at load position the magnets are above the
load sensors which allows measurement of the chuck position with respect of the
lens.
After loading a reticle, the chuck encoder system must be placed back in control for
accurate position during exposures. In other words, the chuck encoder system must
be “Zeroed” and then the chuck encoders will be placed in control of the chuck
position. Reference marks on the chuck encoder scales are used to identify this
“Zero” position, and then control is returned to the chuck encoder system.

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Z-Difference Sensor
The Z-Difference Sensors measure the Z, Rx and Ry position of the chuck during
reticle exchange. At load position the chuck is not above the Z-capacitive sensors, so
other sensors are required. The target for the sensor is mounted on the chuck. The
sensor is mounted on the SS frame.
. For the locations see the circles in Figure 1.21.
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Figure 1.21 Z-Difference sensors

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Support Units

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Figure 1.22 Support Module Locations

The reticle stage is equipped with sub-assemblies that support the functions of the
reticle stage, including: the reticle stage module electronics rack and the pneumatic
unit.

Reticle Stage Module Rack

The Reticle Stage Module Rack (RSMR) contains the electrical interface for the

Figure 1.23 Scanning Reticle Stage Module Rack

reticle stage.
• Power supplies

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 20 For training purposes only

Provide power for the sensor board and the reticle stage pneumatic unit
• Stages I/O Board
The Stages I/O Board (SIOB) acquires specific analog signals within the
reticle stage and convert the analog signals to digital signals. The SIOB
also handles all of the serial communication with the reticle stage motion
and control circuitry.

Pneumatics Unit
Reticle stage pneumatic functions are controlled and supplied via the reticle stage
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Figure 1.24 Scanning Reticle Stage Pneumatics Control

pneumatic unit. This unit is positioned at the right side of the reticle stage module. In
Figure 1.24 it is shown without covers. It contains controllers and components
required for pneumatic support of the module The reticle stage air shower is not
supported by the pneumatic unit.
Five major component areas of the pneumatic unit:
1. Supply test points
- allow connection of test equipment for checking of pressures and vacuum
2. Two Chuck gas functions boards
- Three functions: clamp (vacuum), free (environment pressure) and
cleaning gas
3. Airbearing restrictors (ABR) for the four sets of long stroke airbearings
– To manual adjust the pneumatic pressure
– Solenoid switching of air bearings
– Actual Pressure feedback
4. Vacuum Generator unit
- Generates vacuum for Reticle clamping. Vacuum is generated by means
of system compressed air

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External connections
The Reticle Stage module is connected to the outside world (electronics cabinets,

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Figure 1.25 RS Modules external connections

mains power supply, cooling water cabinets). All involved hoses and cables come in
the RS module at the right side. Figure 1.25 shows the involved connection plates on
the Reticle Stage Module.

Service Module

Figure 1.26 Scanning Reticle Stage Service Module

The purpose of the service module is to allow movement of the reticle stage
assembly providing accessibility for service, installation, and replacement of reticle
stage components. It also allows access to the projection lens area and to
components that are mounted on the metrology frame.

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Electronics Cabinets
Separate from the Reticle Stage Module two electronics cabinets are connected to
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Figure 1.27 ELEC Cabinet

the Reticle Stage Module.

The ELEctronics Cabinet (ELEC)
– Contains the Interferometer System Rack (IFSR) which contains the
Encoder boards and the Z-capacitive sensor board
– Contains the Measurement Position Control Rack (MPCR) which contains
the motion control boards for both Wafer Stage and Reticle Stage

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ASML Confidential
Figure 1.28 RSRC cabinet

The Reticle Stage Remote Cabinet (RSRC) is located in the sub fab and connected
to the Reticle Stage module.
– Contains the Reticle Stage power supplies and amplifiers which deliver the
motor power for the Long Stroke and Short Stroke motors

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 2
PROCEDURES

INTRODUCTION This chapter will discuss the procedures to be performed as part of the level 2
qualification process for Reticle Stage. The discussion of the procedures will NOT be
a reiteration of the coach procedure, but rather amplifying information concerning the
coach procedure.
Always refer to the coach procedure for specific prerequisites, actions, and
specifications.

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The Coach
Procedures: 1. PREPARE RETICLE STAGE FOR MAINTENANCE
2. REMOVE & INSTALL RETICLE STAGE COVERS (Top covers only)
3. CLEAN RETICLE SUPPORT SURFACES
4. MEASURE CABLE DUCT CLEARANCE
5. CHECK RETICLE STAGE PERFORMANCE
 26 For training purposes only

PREPARE RETICLE STAGE FOR MAINTENANCE

Procedure Name PREPARE RETICLE STAGE FOR MAINTENANCE

Coach Number csrs011.adj

Function To stop the reticle stage so maintenance can be performed and restart the reticle
stage when maintenance is complete. When the test is started, the vacuum is turned
off and the cleaning gas is turned on. The cleaning gas is turned off and the vacuum
is turned on when the reticle stage is restarted.

Preconditions N.A.

Points of Attention

Sequence of Events Input Screen

Open the TWINSCAN Navigation Manager window.
Start the test
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The message The reticle stage is now ready for maintenance appears when the
reticle stage has stopped.
– Note: Do not select an option on this message.
Locate and open the following circuit breakers on the Mains Switch Distribution Unit
(MSDU) in the Mains Distribution Cabinet (MDS) and follow the lock out section of
procedure csel001.loc
1. RSY LSPR (F52-2) circuit breaker.
2. RSBM LSPR (F52-5)
3. RSY SSPR (F52-3)
4. RSXZ SSPR (F52-6).
Perform the required maintenance on the reticle stage.
When the maintenance is complete, and all covers have been replaced, continue this
procedure with the section, RESTART THE RETICLE STAGE.
Following the REMOVE THE LOCK FROM THE CIRCUIT BREAKER section of
procedure csel001.loc remove the locks and power on the breakers:
1. RSY LSPR (F52-2)
2. RSBM LSPR (F52-5)
3. RSY SSPR (F52-3)
4. RSXZ SSPR (F52-6).
The steps in the test will restart the stage after power is restored and the system is
made safe.

SW: Test technique

Procedure csrs011.adj is fully automated. All that is required is to execute the test to
put the stage in maintenance mode, and continue the test to restart the stage.

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Procedure Results Procedure csrs011.adj provides the utility to park the reticle stage in a safe
maintenance position, and turn on the cleaning gas. When maintenance is complete
the second part of the procedure turns off the cleaning gas, and re-initializes and
prepares the stage for normal operation.

On Screen Result
When the stage is in maintenance position, the test window will display the message:
The reticle stage is now ready for maintenance.
When the stage is back in service, the test window will display the message:
OK: Test finished successfully

Failure Response Failure Mode / Action Required

If the reticle stage fails to initialize, check the cover interlocks on the display located
on the left side of the system behind panel PL13. All the lights should be green. If not,
readjust the stage covers.
If the interlocks are all closed, try initializing the system with Command Handler.
If Command Handler fails, try system initialization using the Start Up / Shutdown view
of the Navigation Manager, Start function.

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REMOVE & INSTALL RETICLE STAGE COVERS (TOP COVERS ONLY)

Procedure Name REMOVE & INSTALL RETICLE STAGE COVERS

Coach Number csrs025.rep

Function Install and remove the reticle stage covers in the correct sequence.

Preconditions 1. Do the PREPARE THE RETICLE STAGE FOR MAINTENANCE section of

procedure csrs011.adj.
2. Do the TURN OUT TURRET section of procedure csrh009.adj.
3. Do the LIFT THE ILLUMINATOR TOP MODULE section of procedure csil001.adj.

Points of Attention To support the L-2 lab activities, only the top covers have to be removed.
The covers have grounding wires attached. Be sure to unclip the ground wires before
completely removing the covers.
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Sequence of Events HW: Replacements / Adjustments:

REMOVE THE FOUR LONGSTROKE COVERS TO ACCESS THE STAGE.
INSTALL THE COVERS IN REVERSE ORDER.
1. Run the RESTART THE RETICLE STAGE section of procedure csrs011.adj.
2. Do procedure csrs020.dia to check the status of the reticle stage interlocks.

Procedure Results N.A.

On Screen Result
Prepare for maintenance test.
The reticle stage is now ready for maintenance.
OK: Test finished successfully

Failure Response Failure Mode / Action Required

Check display for cover interlock errors. The display is located behind panel PL13.

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CLEAN RETICLE SUPPORT SURFACES

Procedure Name CLEAN RETICLE SUPPORT SURFACES

Coach Number csrs002.cle

Function Twinscan systems can contain a rigid reticle chuck (called an R-chuck) or a flexible
reticle chuck (called an F-chuck). This procedure contains the steps you must follow
to clean both types of reticle chuck.
–

Preconditions Do the PREPARE THE RETICLE STAGE FOR MAINTENANCE section of procedure
csrs011.adj.

Points of attention – DANGER: STRONG MAGNETIC FIELDS ARE PRESENT WITHIN THE
RETICLE STAGE MODULE. These can interfere with electrical equipment,
including pacemakers, at close range.

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1. WARNING: ASML CLEANING FLUID IS A HIGHLY FLAMMABLE LIQUID. Keep
away from hot surfaces.
2. If available, use a cold (monochromatic) light source to ensure that all particles
are removed from the reticle support surfaces.
– Note: To ensure the light source is stable, place it on the heat shield cover on
top of the short-stroke motor.
3. Inspect the reticle chuck to see if your system has a flexible chuck (F-chuck) or a
rigid chuck (R-chuck). If the chuck has multiple (that is, more than two) dots on
the surface it is an F-chuck.
– CAUTION: NEVER TOUCH OR CLEAN THE RETICLE CHUCK FIDUCIAL
MARKERS. Fiducial markers are easily damaged.

Sequence of Events Input Screen:

Reticle Handler Diagnostic Test view.

SW: Test Technique

The test is fully automated. Operator intervention is only required to step sequentially
from unload reticles to initalize the stage.

HW: Replacements / Adjustments

CLEAN A FLEXIBLE RETICLE CHUCK (F-CHUCK)
– CAUTION: ONLY CLEAN THE TOP SURFACE OF THE MEMBRANES. Do not
touch the sides of the membranes. Membranes are easily damaged.
– CAUTION: OBEY THE FOLLOWING CLEANING INSTRUCTIONS
CAREFULLY. Parts of the reticle chuck can be easily damaged.
1. Clean the reticle support surfaces of the reticle chuck. Use large Alpha swabs
moistened with a small amount of ASML optical cleaning fluid. Clean as follows:
2. Use ASML optical cleaning fluid. Do not use acetone

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3. Use a very small amount of cleaning fluid. The swab must be moist, not wet
COMPLETE THE PROCEDURE
4. Do the RESTART THE RETICLE STAGE section of procedure csrs011.adj.

Procedure Results N.A.

On Screen Result
csrs011.adj - OK: Test finished successfully
Command Handler - Initialized

Failure Response Failure Mode / Action Required

If the RESTART THE RETICLE STAGE section of procedure csrs011.adj fails, the
following is an alternative method for initializing the reticle stage sub-system.
1. Open the TWINSCAN Navigation Manager window.
2. Select the Maintenance button from the toolbar.
3. Select the Tools menu.
4. Select the Command Handler option.
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5. Select Reticle Stage. The Reticle Stage menu shows.

6. Select General Commands. The General Commands menu shows.
7. Select Initialize.
8. Select Get Status to make sure the reticle stage has been initialized.
9. Handler Report window shows.
10. Check the Initialized field.
11. If the value in this field is Yes, the reticle stage has initialized correctly.
12. Select Exit to close the TWINSCAN Command Handler Report window.
13. Select Exit. The Reticle Stage menu shows.
14. Select Exit. The Reticle System menu shows.
15. Select Exit. The TWINSCAN Command Handler window shows.
16. Select Exit again to close the TWINSCAN Command Handler window.

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MEASURE CABLE DUCT CLEARANCE

Procedure Name MEASURE CABLE DUCT CLEARANCE

Coach Number csrs018.dia

Function This procedure explains how to measure the clearance between the RS cable ducts
and the balance mass.

Preconditions Remove the RS covers on both sides.

Make sure the cable duct support brackets are not loose.
Make sure the balance masses are at approximately the centre of their range.
Move the long stroke slide until the cable duct support brackets have the same Y
position.

Sequence of Events HW: Replacements / Adjustments

MEASURE THE CABLE DUCT CLEARANCE

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Make sure the clearance between the cable loops and the balance mass is within
specifications
Replace the covers

Procedure Results N.A.

On Screen Result
N.A.

Failure Response Failure Mode / Action Required

If the cable duct clearance is too small, check for a mechanical reason.
If the cable clearance is due to a sagging cable, the cable may need to be replaced.

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CHECK THE STAGE PERFORMANCE (WAFER OR RETICLE STAGE)

Procedure Name Check the Stage Performance (Wafer stage or Reticle stage)

Coach Number csrs001.per or csws032.per

Function The Wafer stage test is performed in 2 parts. These check the WS exposure and
measurement performances. The measurements are done for both chucks.
• The first test checks if all servo errors during exposure scans with pre-defined
polynomials are within specifications. In this case, the measure chuck is moving
in the worst case scenario.
• The second test checks if all servo errors are within specifications during scans
on the measure side. This is done by moving the measure chuck with wafer set
points with other chuck stationary.
The Reticle stage procedure measures the performance of the reticle stage. The
procedure measures the moving average and moving standard deviation of the
reticle stage.
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Preconditions Make sure that wafer and reticles are available to be loaded onto the Twinscan.

Points of attention The purpose of the Stages performance test is to offer the user the opportunity to
diagnose and qualify the performance of the WS and RS. To qualify, 8 different test
case are available which consist of a mixture of WS and RS measurements. The
diagnostic part of the Stages performance test is not implemented yet.
The performance of the stage is determined by calculating the maximum moving
average (MA) error and maximum moving standard deviation (MSD) of all axis of the
stages. These values are checked versus a criterion value.
The Stages performance test generates a report containing all MA and MSD values
of all measured axis and dies. In case of a combined RS and WS test case the total
stage error is also calculated and verified. Also, the maximum absolute error of any of
the axis during acceleration, jerk and constant velocity is shown in the report.
To accurately evaluate a stage performance as used in production wafers and
reticles should be loaded onto the stages so that the stage masses are equivalent to
the masses encountered during production.

Sequence of Events Input Screen

When performing the wafer stage portion select these test conditions:
• WSE scan with wafer stipends and WSM scanning
• WSM only scans without wafer stipends
When performing the reticle stage portion select these test conditions:
• RS performance scan

Procedure Results On Screen Result

OK/NOK result

Failure Response Failure Mode/Actions required

Check result, if the results are all in specification, then no further action is required.
If the wafer stage results are not within specification contact Veldhoven.

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If the reticle stage results are not within specification:

Make sure these reticle stage calibrations are competed and within specification:
• Calibrate the zero sensor
• Calibrate the load sensor
• Calibrate the long stroke cogging correction
• Calibrate difference sensors
• Calibrate the short stroke motor
• Calibrate the long stroke motor
• Calibrate the capacitive Z-sensors
• Calibrate the gravity compensator factor
• Calibrate damping and stiffness
Make sure the airmount performance is within specification.
Make sure the incoming air pressure is within specification.
Do procedure csrs017.dia if you still do not have a solution.

ASML Confidential

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 A
APPENDIX: SCANNING RETICLE STAGE CHUCK
TYPE 2 (WITH ENCODER)

INTRODUCTION

ASML Confidential
Figure A.1 Reticle Stage Module

The reticle stage subsystem is a completely independent subsystem that is mounted

inside the exposure unit. Scanning synchronization, interactions with other
subsystems, and calibrations and testing are handled by various software programs.
The stage consists of electro-mechanical components that scan the reticle in the Y
(front to back in the exposure unit) at a four to one ratio to the wafer stage; a function
of the 4X projection lens reduction. The reticle is also controlled in vertical (Z), left to
right (X), and rotation around vertical (Rz) to assure accurate placement of the image.

Safety devices, cooling, vacuum for reticle clamping, compressed gas, electrical
supplies and control electronics are all supported by subsystems located appropriate
for the specific function.
Reticle Stage functions include the following:
• Position the reticle stage for reticle exchange.
• Clamp and Support the reticle.
• Position and move the reticle above the lens to enable accurate exposure of each
die.
• Reticle movement during alignment.
• TIS scan and calibration.
• The shift in and shift out facility for servicing.
 2 For training purposes only

Reticle Stage Location

Not different from Reticle Stage in the XT-rev2 platform.
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Figure A.2 Reticle Stage

The reticle stage is located near the center of the Twinscan exposure unit, above the
projection lens and below the illumination top module.

Reticle Stage Functions

Not different from Reticle Stage in the XT-rev2 platform.
1. move chuck to reticle exchange position
2. clamp reticle on transfer from turret
3. move reticle to expose position above lens
4. position reticle for alignment and exposure
5. transport the reticle to reticle exchange position and transfer back to turret

The Reticle Stage service unit provides lift and shift capabilities, easing maintenance
procedures.

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MAJOR COMPONENTS

Location of the major components is shown in Figure A.3

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Figure A.3 RS major components

The Reticle Stage module is located in the Twinscan Exposure Unit, the controlling
and power electronics are located in two different electronics cabinets, located in the
sub-fab. Two water cabinets, which are not part of the Reticle Stage system but
supporting it, are located in the sub-fab as well.

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Figure A.4 Reticle Stage components

The location and naming of the Reticle Stage Module components and supporting
components are shown in Figure A.4.

1.Long Stroke Module

– provides movement of the Short Stroke module in Y.

2.Short Stroke module

– used to house the reticle chuck and its actuators. The actuators allow the
chuck to be manipulated in all six degrees of freedom.

3.Support Units
– both system electronics and pneumatics are support units for the reticle
stage.

4.Electronic cabinets
– two racks inside the Electronics Cabinet 2.2 provide control and data
processing
– Electronics Cabinet 3.2 provides necessary power for the Reticle Stage
motors

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5.Service Unit
– sits below the Reticle Stage on the system base frame. It has the capability
of lifting the reticle stage off the system base frame and shifting it out to the
left side of the machine

Module Components
The Long Stroke Module (LoS) positions the Short Stroke Module (SS) for load/
unload, alignment, and exposure.

Figure A.5 Reticle Stage Module ASML Confidential

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Figure A.6 Reticle Stage Module

The reticle stage chuck is supported by the short stroke frame, but does not
physically touch any of the reticle stage chuck components. The gravity com-
pensation system provides an air bearing for the reticle stage chuck.
Short Stroke Module frame
The interface between the reticle chuck and the long stroke module slide.
There is no physical connection between the short stroke frame and the reti-
cle stage chuck, therefore creating the Silent World.
Reticle chuck
supports the reticle during exposure and exchange sequences.
Actuators:
The X,Y and Z actuators are Lorentz motors and, by design, contain magnets
and coils that do not touch.
Z-actuators
Moves the reticle chuck vertically in 3 degrees of freedom (Z, Ry, and Rx), and
provides isolation from the rest of the system.
X/Y-actuators
Moves the reticle chuck horizontally in 3 degrees of freedom (X,Y, and Rz

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Long Stroke Module

Functional not different from Reticle Stage in the XT-rev2 platform
(only small changes on lower level).

The Long Stroke Module (LoS) positions the Short Stroke Module (SS) for load/
unload, alignment, and exposure. It includes the y-unit frames, balance masses, and
Long Stroke Slides. It provides long Y direction motions of the SS module

ASML Confidential
Figure A.7 Long Stroke Module

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Figure A.8 Long Stroke Components

The long stroke module contains the following components:

• Two y-unit frames
• Two balance masses
• Two long stroke slides

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Y- Unit frames
Two Y unit frames (one on each side of the reticle stage) support the Balance Mass
assembly on airbearings. They contain the Balance Mass motors (motor coils) and
the position encoder sensor (used to measure the Balance Mass position with
respect to the Y-unit Frame).

ASML Confidential
Figure A.9 Y-Unit frame

Balance Masses
The balance rides on air-bearing surfaces located on the Y-unit frame. The balance

Figure A.10 Balance Masses

counteracts large forces generated during scanning by moving freely in the opposite
direction of the long stroke slides.
Both the magnets for the LoS motors and the magnets for the Balance Mass motor
reside on the Balance Mass (the LoS motor coils are located in the Long stroke slide
assembly).

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The optical encoder ruler for the Balance Mass position and the optical encoder ruler
for the Long Stroke position are located on the Balance Mass.
The Balance mass also has the air-bearing surfaces for the Long Stroke slide
assembly.

Long Stroke Slides

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Figure A.11 Long Stroke Slide

The long stroke slide serves as a mechanical interface between the long stroke
module and the short stroke module. The slides allow the long stroke module to move
the short stroke module (including chuck and reticle) the distance required to expose
an image, access reticle stage fiducials, and exchange reticles.
The long stroke slide houses the coils for the long stroke motor, also cooling water
lines are routed towards the motor coils.
The position encoder sensor (used to measure the LoS slide position with respect to
the Balance Mass) are also located on the long stroke slide.
The long stroke slide floats with an air cushion on the balance mass. They are
positioned in parallel on the right and left side of the short stroke module.
Figure A.11 also shows the locations of:
Cable Duct Interfaces for cable ducts that supply the system electronics, water, and
pneumatics.
Airbearings that support the Long Stroke in X and Z direction
Z-interface supports the Reticle stage short stroke module in Z, Ry, and Rx.
X/Y-interface supports the Reticle stage short stroke module in X,Y, and Rz.
Long Stroke Motor locking plate locks the reticle stage long stroke slide to the Y-
unit when the reticle stage is in the reticle exchange position.

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Short Stroke Module

The reticle stage short stroke module houses the Short Stroke Frame, actuators, and
chuck and is called the short stroke because its range of motion is very small.

Short Stroke Frame

Two Short Stroke Frame designs exist. The original asymmetric design and a new
model containing many new components. This section presents information on the
original asymmetric design.

For the type2 chuck using a short stroke encoder measurement system, the
asymmetric design does not necessarily make sense. That is because the type2
chuck is an intermediate design that incorporated an encoder measurement system.
However, the chuck and the short stroke module were not redesigned until a later
date.

Both styles of frames act as interfaces between the reticle stage chuck and the long
stroke slides. the frame supports the coils used in the X and Y Short Stroke Motors,

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and the reticle stage chuck Z-actuators. These units work together to manipulate the
chuck in all six degrees of freedom.

Connections for cooling water, and for air and vacuum, are also located on the frame.
The water is routed through the frame to dissipate actuator heat build up. The air and
vacuum are routed through the frame and through the Z-actuators to the chuck.

Figure A.12 Short Stroke Module

The use of an interferometer measuring system forced the asymmetrical design of

the original Short Stroke Frame. One side of the frame had to be raised to allow the X
interferometer beam to reach the mirror on the side of the chuck. With the Type-2
encoder chuck using encoders to measure horizontal position, the asymmetric design
was not necessary, but the design was not changed.

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Actuators
The X,Y and Z actuators are Lorentz motors. By design, they contain magnets and
coils with no physical connection, allowing controlled motion while maintaining the
silent world.

X/Y-actuators
Move the reticle chuck horizontally in 3 degrees of freedom (X,Y, and Rz).

Z-actuators
The Z-actuators are a combination of a Lorentz motor and a gravity compensator.
They move the reticle chuck vertically in 3 degrees of freedom (Z, Ry, and Rx), and
provide isolation from the rest of the system.

X/Y Actuator
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Figure A.13 X/Y Actuator

The X/Y actuator system manipulates the reticle chuck in the horizontal plane, i.e.
three degrees of freedom, X,Y, and Rz. Three Lorentz actuators, two for Y direction
and one for X, perform this task. The lack of physical contact between the two parts
eliminates noise transfer to the silent world of the reticle stage. The actuator magnets
are attached to the chuck and the coils are attached to the short stroke frame.

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Gravity Compensators

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Figure A.14 Pneumatic Gravity Compensators

Three Z-actuators manipulate the reticle stage chuck in three vertical degrees of
freedom: Z, Rx, and Ry. Lorentz actuators in conjunction with a gravity compensation
system achieve this motion.
The gravity compensators support most the weight of the chuck allowing the Z-
actuators to use less current. Gravity compensators lift most of the weight of the
chuck with the Lorentz motors making small rapid corrections, allowing smaller
motors, increasing responsiveness, and decreasing generated heat.

Z-Actuators

Figure A.15 Z-Actuator Detail

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The Type-1 and Type 2 chuck Z-actuator design uses a pneumatic gravity
compensator along with a Lorentz Motor for Z motion. The gravity compensator
consisted of a piston pushed up by pressurized air floating in a cylinder. Rings and
channels in the cylinder and piston allowed vacuum to pass to the chuck without
physical attachments.

An incorporated LVDT detector measured the height of the reticle chuck with respect
to the short stroke frame when the reticle chuck moved horizontally out of Z-
capacitive sensor range (Reticle Exchange Position).

Reticle chuck
Clamps and supports the reticle during exposure and exchange sequences.
ASML Confidential

Figure A.16 Reticle Stage Chuck

The reticle stage chuck supports the reticle during the exposure and exchange
sequences. It is constructed from a single block of Zerodur to minimize thermal
effects.
The type2 configuration contains an encoder system to measure Short Stroke X and
Y Positions.

The reticle stage chuck is supported by the short stroke frame, but does not
physically touch any of the reticle stage chuck components. The gravity
compensation system provides an air bearing for the reticle stage chuck.

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Scanning Reticle Stage Support Modules

Figure A.17 Support Module Locations

The reticle stage is equipped with sub-assemblies that support the functions of the
reticle stage, including: the reticle stage module electronics rack, the pneumatic unit,

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and the electronics cabinets.

Electronics

Figure A.18 Scanning Reticle Stage Electronics

The reticle stage module rack contains the electrical interface for the reticle stage.
• Power supplies
Provide power for various sensor boards, the reticle stage pneumatic unit,
and capacitive Z sensor (all located on the reticle stage module rack)
• Sensor boards

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Acquire specific analog signals within the reticle stage and converts the
analog signals to digital signals. They also handle all of the serial
communication with the reticle stage motion and control circuitry.
• Capacitive Z sensor boards
Receive signals from the capacitive Z sensors and communicate with the
Z-axis motion controllers.

Pneumatics
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Figure A.19 Scanning Reticle Stage Pneumatics Control

Reticle stage pneumatic functions are controlled and supplied via the reticle stage
pneumatic unit. This unit is positioned at the right side of the reticle stage module. It
contains controllers and components required for pneumatic support of the module
The reticle stage air shower is not supported by the pneumatic unit.
Internal to the unit is a control module for each of the four sets of long stroke module
airbearings, a control module for the gravity compensator air supply and two control
modules for the reticle stage vacuum clamp/free and cleaning gas.

Five major component areas of the pneumatic unit:

1. Supply test points
- allow connection of test equipment for checking of pressures and vacuum
2. Gravity compensator boards
- provides pneumatic power to the gravity compensators for Pneumatic
Gravity Compensators only.
3. Gas functions boards
- Three functions: cleaning gas, vacuum, clamp free gas

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4. Airbearing Restrictors
- provides pneumatic setting of the long stroke airbearings
5. Vacuum Supply unit
- Generates vacuum for Reticle clamping. Vacuum is generated by means
of compressed air

Electronics Cabinets

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Figure A.20 El Cabinet 2.2 on the left and the El cabinet 3.2 on the right

The electronics cabinet 2.2 houses the interferometer rack and motion control rack,
and the electronics cabinet 3.2 houses the power supplies for the Reticle Stage
motors.

Service Module
The purpose of the service module is to allow movement of the reticle stage
assembly providing accessibility for service, installation, and replacement of reticle
stage components. It also allows access to the projection lens area and to
components that are mounted on the metrology frame.

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Figure A.21 RS Service Module

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Short Stroke Module Type-2 (with encoder system) Position Sensors

• Encoder
– Determines Chuck position horizontally (X, Y, Rz)
• Zero Sensor
– Determines the origin of the encoder system (X, Y, Rz)
• Difference Sensor
– Measures position of Chuck with respect to Short Stroke Module, provides
controlling signal to Long Stroke Module (X, Y)
• Z- Capacitive Sensor
– Determines Height and Tilt of Chuck to lens (Z, Ry, and Rx)
• Load Sensors
– Determines the position of the chuck when loading a reticle (X, Y)
• LVDT Sensor
– Maintains Z-position of reticle chuck in the load position (Z, Rx, Ry)

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Encoders
The Reticle Stage Encoder System measures the Reticle Chuck position in X, Y, and
Rz. Three readers located on the lens top measure scales glued to the chuck. One
reader measures X position and the other two readers measure Y position and Rz
rotation.

ASML Confidential
Figure A.22 Scanning Reticle Stage encoder system

Zero Sensors

Figure A.23 Zero Sensor Location

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On the lens top are hall sensors that measure the position of magnets located on the
bottom of the reticle chuck. They are Zero sensors that measure the X,Y and Rz
position of the Reticle Chuck with respect to the top of the lens. The Zero Sensors are
used to give a reference to the Encoder measurement system.

Difference Sensors
Difference Sensors measure the position of the Chuck with respect to the Short
ASML Confidential

Figure A.24 Difference Sensor Locations

Stroke Frame. The combination of a magnet attached at the Chuck and a sensor
attached to the short stroke frame creates a diff sensor. Three diff sensors are
implemented, one X and two Y sensors, together they provide X, Y, Rz position
feedback.
Diff sensor control is required to position the reticle chuck when the Encoder system
is not active yet (before zeroing the encoder system) and to control position when out
of Encoder sensor range during reticle exchange.
The diff sensors are also needed as feedback for the long stroke motors in this way
the long stroke motors can “follow” the short stroke module when moving.
When the short stroke motor receives a new setpoint, the Lorentz motors move
the reticle chuck. The Y-diff sensors will detect the motion and this will drive the
long stroke motors. When the chuck reaches the desired location, the Y-diff
sensors return to center position, so the long stroke motors stops driving.

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Z-Sensors

Figure A.25 Capacitive Sensors (Z-Sensors)

The Z-capacitive sensor system is comprised of four Z-capacitive sensors, mounted

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on top of the lens. On the bottom of the Reticle Chuck are four metallic strips. The Z-
sensors measure the height of the reticle stage with respect to the lens. The sensors
measure the relative distance between the sensors and the metallic strips, which
represents reticle stage Z, Rx and Ry.

Load Sensors

Figure A.26 Load Sensors Location

The load sensors (X, Y) measures the reticle chuck position when loading a reticle.

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ASML Confidential

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 B
APPENDIX: SCANNING RETICLE STAGE CHUCK
TYPE 1 (& TYPE2 WITH IFM)

INTRODUCTION

ASML Confidential
Figure B.1 Reticle Stage Module

The reticle stage subsystem is a completely independent subsystem that is mounted

inside the exposure unit. Scanning synchronization, interactions with other
subsystems, and calibrations and testing are handled by various software programs.
The stage consists of electro-mechanical components that scan the reticle in the Y
(front to back in the exposure unit) at a four to one ratio to the wafer stage; a function
of the 4X projection lens reduction. The reticle is also controlled in vertical (Z), left to
right (X), and rotation around vertical (Rz) to assure accurate placement of the image.

Safety devices, cooling, vacuum for reticle clamping, compressed gas, electrical
supplies and control electronics are all supported by subsystems located appropriate
for the specific function.
Reticle Stage functions include the following:
• Position the reticle stage for reticle exchange.
• Clamp and Support the reticle.
• Position and move the reticle above the lens to enable accurate exposure of each
die.
• Reticle movement during alignment.
• TIS scan and calibration.
• The shift in and shift out facility for servicing.
 2 For training purposes only

Reticle Stage Location

Not different from Reticle Stage in the XT-rev2 platform.
ASML Confidential

Figure B.2 Reticle Stage

The reticle stage is located near the center of the Twinscan exposure unit, above the
projection lens and below the illumination top module.

Reticle Stage Functions

Not different from Reticle Stage in the XT-rev2 platform.
1. move chuck to reticle exchange position
2. clamp reticle on transfer from turret
3. move reticle to expose position above lens
4. position reticle for alignment and exposure
5. transport the reticle to reticle exchange position and transfer back to turret

The Reticle Stage service unit provides lift and shift capabilities, easing maintenance
procedures.

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MAJOR COMPONENTS

ASML Confidential
Figure B.3

1.Long Stroke Module

– provides movement of the Short Stroke module in Y.

2.Short Stroke module

– used to house the reticle chuck and its actuators. The actuators allow the
chuck to be manipulated in all six degrees of freedom.

3.Support Units
– both system electronics and pneumatics are support units for the reticle
stage.

4.Electronic cabinets
– provide control and data processing

5.Service Unit
– sits below the Reticle Stage on the system base frame. It has the capability
of lifting the reticle stage off the system base frame and shifting it out to the
left side of the machine

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Module Components
The Long Stroke Module (LoS) positions the Short Stroke Module (SS) for load/
unload, alignment, and exposure.
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Figure B.4 Reticle Stage Module

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Figure B.5 Reticle Stage Module

The reticle stage chuck is supported by the short stroke frame, but does not
physically touch any of the reticle stage chuck components. The gravity com-
pensation system provides an air bearing for the reticle stage chuck.
Short Stroke Module frame
The interface between the reticle chuck and the long stroke module slide.
There is no physical connection between the short stroke frame and the reti-
cle stage chuck, therefore creating the Silent World.
Reticle chuck
supports the reticle during exposure and exchange sequences.
Actuators:
The X,Y and Z actuators are Lorentz motors and, by design, contain magnets
and coils that do not touch.
Z-actuators
Moves the reticle chuck vertically in 3 degrees of freedom (Z, Ry, and Rx), and
provides isolation from the rest of the system.
X/Y-actuators
Moves the reticle chuck horizontally in 3 degrees of freedom (X,Y, and Rz

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Long Stroke Module

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Figure B.6 Long Stroke Components

Functional not different from Reticle Stage in the XT-rev2 platform (only small
changes on lower level).

The long stroke module can be broken down further into:

• Two y-unit frames
• Two balance masses
• Two long stroke slides

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Y- Unit frames
Two Y unit frames (one on each side of the reticle stage) support the Balance Mass
assembly on airbearings. They contain the Balance Mass motors (motor coils) and
the position encoder sensor (used to measure the Balance Mass position with
respect to the Y-unit Frame).

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Figure B.7 Y-Unit frame

Balance Masses
The balance rides on air-bearing surfaces located on the Y-unit frame. The balance

Figure B.8 Balance Masses

counteracts large forces generated during scanning by moving freely in the opposite
direction of the long stroke slides.
Both the magnets for the LoS motors and the magnets for the Balance Mass motor
reside on the Balance Mass (the LoS motor coils are located in the Long stroke slide
assembly).

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The optical encoder ruler for the Balance Mass position and the optical encoder ruler
for the Long Stroke position are located on the Balance Mass.
The Balance mass also has the air-bearing surfaces for the Long Stroke slide
assembly.

Long Stroke Slides

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Figure B.9 Long Stroke Slide

The long stroke slide serves as a mechanical interface between the long stroke
module and the short stroke module. The slides allow the long stroke module to move
the short stroke module (including chuck and reticle) the distance required to expose
an image, access reticle stage fiducials, and exchange reticles.
The long stroke slide houses the coils for the long stroke motor, also cooling water
lines are routed towards the motor coils.
The position encoder sensor (used to measure the LoS slide position with respect to
the Balance Mass) are also located on the long stroke slide.
The long stroke slide floats with an air cushion on the balance mass. They are
positioned in parallel on the right and left side of the short stroke module.
Figure B.9 also shows the locations of:
Cable Duct Interfaces for cable ducts that supply the system electronics, water, and
pneumatics.
Airbearings that support the Long Stroke in X and Z direction
Z-interface supports the Reticle stage short stroke module in Z, Ry, and Rx.
X/Y-interface supports the Reticle stage short stroke module in X,Y, and Rz.
Long Stroke Motor locking plate locks the reticle stage long stroke slide to the Y-
unit when the reticle stage is in the reticle exchange position.

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Short Stroke Module

The reticle stage short stroke module houses the Short Stroke Frame, actuators, and
chuck and is called the short stroke because its range of motion is very small.

Short Stroke Frame

Two Short Stroke Frame acts as an interface between the reticle stage chuck and the
long stroke slides. the frame supports the coils used in the X and Y Short Stroke
Motors, and the reticle stage chuck Z-actuators. These units work together to
manipulate the chuck in all six degrees of freedom.

Connections for cooling water, and for air and vacuum, are also located on the frame.
The water is routed through the frame to dissipate actuator heat build up. The air and
vacuum are routed through the frame and through the Z-actuators to the chuck.

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Figure B.10 Short Stroke Module

The use of an interferometer measuring system forced the asymmetrical design of

the original Short Stroke Frame. One side of the frame had to be raised to allow the X
interferometer beam to reach the mirror on the side of the chuck.

Actuators

The X,Y and Z actuators are Lorentz motors. By design, they contain magnets and
coils with no physical connection, allowing controlled motion while maintaining the
silent world.

X/Y-actuators
Move the reticle chuck horizontally in 3 degrees of freedom (X,Y, and Rz).

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Z-actuators
The Z-actuators are a combination of a Lorentz motor and a gravity compensator.
They move the reticle chuck vertically in 3 degrees of freedom (Z, Ry, and Rx), and
provide isolation from the rest of the system.

X/Y Actuator
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Figure B.11 X/Y Actuator

The X/Y actuator system manipulates the reticle chuck in the horizontal plane, i.e.
three degrees of freedom, X,Y, and Rz. Three Lorentz actuators, two for Y direction
and one for X, perform this task. The lack of physical contact between the two parts
eliminates noise transfer to the silent world of the reticle stage. The actuator magnets
are attached to the chuck and the coils are attached to the short stroke frame.

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Gravity Compensators

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Figure B.12 Pneumatic Gravity Compensators

Three Z-actuators manipulate the reticle stage chuck in three vertical degrees of
freedom: Z, Rx, and Ry. Lorentz actuators in conjunction with a gravity compensation
system achieve this motion.
The gravity compensators support most the weight of the chuck allowing the Z-
actuators to use less current. Gravity compensators lift most of the weight of the
chuck with the Lorentz motors making small rapid corrections, allowing smaller
motors, increasing responsiveness, and decreasing generated heat.

Z-Actuators

Figure B.13 Z-Actuator Detail

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The Type-1 and Type 2 chuck Z-actuator design uses a pneumatic gravity
compensator along with a Lorentz Motor for Z motion. The gravity compensator
consisted of a piston pushed up by pressurized air floating in a cylinder. Rings and
channels in the cylinder and piston allowed vacuum to pass to the chuck without
physical attachments.

An incorporated LVDT detector measured the height of the reticle chuck with respect
to the short stroke frame when the reticle chuck moved horizontally out of Z-
capacitive sensor range (Reticle Exchange Position).

Reticle chuck
Clamps and supports the reticle during exposure and exchange sequences.
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Figure B.14 Reticle Stage Chuck

The reticle stage chuck supports the reticle during the exposure and exchange
sequences. It is constructed from a single block of Zerodur to minimize thermal
effects.
An interferometer system measures displacement using the mirrored left side of the
chuck for X-position and corner cubes (retro-reflectors), at the rear, for Y-position.
The reticle stage chuck is supported by the short stroke frame, but does not
physically touch any of the reticle stage chuck components. The gravity
compensation system provides an air bearing for the reticle stage chuck.

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Scanning Reticle Stage Support Modules

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Figure B.15 Support Module Locations

The reticle stage is equipped with sub-assemblies that support the functions of the
reticle stage, including: the reticle stage module electronics rack, the pneumatic unit,
and the electronics cabinets.

Electronics

Figure B.16 Scanning Reticle Stage Electronics

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The reticle stage module rack contains the electrical interface for the reticle stage.
• Power supplies
Provide power for various sensor boards, the reticle stage pneumatic unit,
and capacitive Z sensor (all located on the reticle stage module rack)
• Sensor boards
Acquire specific analog signals within the reticle stage and converts the
analog signals to digital signals. They also handle all of the serial
communication with the reticle stage motion and control circuitry.
• Capacitive Z sensor boards
Receive signals from the capacitive Z sensors and communicate with the
Z-axis motion controllers.

Pneumatics
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Figure B.17 Scanning Reticle Stage Pneumatics Control

Reticle stage pneumatic functions are controlled and supplied via the reticle stage
pneumatic unit. This unit is positioned at the right side of the reticle stage module. It
contains controllers and components required for pneumatic support of the module
The reticle stage air shower is not supported by the pneumatic unit.
Internal to the unit is a control module for each of the four sets of long stroke module
airbearings, a control module for the gravity compensator air supply and two control
modules for the reticle stage vacuum clamp/free and cleaning gas.

Five major component areas of the pneumatic unit:

1. Supply test points
- allow connection of test equipment for checking of pressures and vacuum
2. Gravity compensator boards
- provides pneumatic power to the gravity compensators for Pneumatic
Gravity Compensators only.

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3. Gas functions boards

- Three functions: cleaning gas, vacuum, clamp free gas
4. Airbearing Restrictors
- provides pneumatic setting of the long stroke airbearings
5. Locking mechanism board
- provides pneumatic control of the long stroke locking mechanism.

Electronics Cabinets

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Figure B.18 Electronics Racks Locations

The electronics cabinets house the interferometer rack (HP rack), motion control rack
and the power supplies for the RS motors.

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Service Module
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Figure B.19 Scanning Reticle Stage Service Module

The purpose of the service module is to allow movement of the reticle stage
assembly providing accessibility for service, installation, and replacement of reticle
stage components
Being able to move the reticle stage components out of the exposure unit also allows
access to the projection lens area and to components that are mounted on the
metrology frame.

Short Stroke Module Type-1 (and Type-2 with Interferometer system) Position Sensors
• Interferometer
– Determines Chuck position horizontally (X, Y, Rz)
• Zero Sensor
– Determines the origin of the interferometer system (X, Y, Rz)
• Difference Sensor
– Measures position of Chuck with respect to Short Stroke Module, provides
controlling signal to Long Stroke Module (X, Y)
• Z- Capacitive Sensor
– Determines Height and Tilt of Chuck to lens (Z, Ry, and Rx)
• Load Sensor
– Determines the position of the chuck when loading a reticle (X)
• LVDT Sensor
– Maintains Z-position of reticle chuck in the load position (Z, Rx, Ry)

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Interferometers
The Reticle Stage Interferometer System measures the Reticle Chuck position in X,
Y, and Rz. Two y-beams travel to the Chuck reflect off retro-reflectors back to the
interferometer system. Y position and Rz information is gathered from these two
signals. Two x-beams reflects off a mirror on the side of the chuck, giving X and Rz
position information. Position control software determines if both Rz positions are
used or not..

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Figure B.20 Scanning Reticle Stage Interferometer beams

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Zero Sensor
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Figure B.21 Zero Sensor Location

On the lens top are hall sensors that measure the position of magnets located on the
bottom of the reticle chuck. They are Zero sensors that measure the X,Y and Rz
position of the Reticle Chuck with respect to the top of the lens. The Zero Sensors are
used to give a reference to the Encoder measurement system

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Difference Sensors
Difference Sensors measure the position of the Chuck with respect to the Short

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Figure B.22 Difference Sensor Locations

Stroke Frame. The combination of a magnet attached at the Chuck and a sensor
attached to the short stroke frame creates a diff sensor. Three diff sensors are
implemented, one X and two Y sensors, together they provide X, Y, Rz position
feedback.
Diff sensor control is required to position the reticle chuck when the Interferometer
system is not active yet (before zeroing the Interferometer system) and to control X-
position when out of Interferometer X-range during reticle exchange.
The diff sensors are also needed as feedback for the long stroke motors in this way
the long stroke motors can “follow” the short stroke module when moving.
When the short stroke motor receives a new setpoint, the Lorentz motors move
the reticle chuck. The Y-diff sensors will detect the motion and this will drive the
long stroke motors. When the chuck reaches the desired location, the Y-diff
sensors return to center position, so the long stroke motors stops driving.

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Z-Sensors

Figure B.23 Capacitive Sensors (Z-Sensors)

The Z-capacitive sensor system is comprised of four Z-capacitive sensors, mounted

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on top of the lens. On the bottom of the Reticle Chuck are four metallic strips. The Z-
sensors measure the height of the reticle stage with respect to the lens. The sensors
measure the relative distance between the sensors and the metallic strips, which
represents reticle stage Z, Rx and Ry

Load Sensors

Figure B.24 Load Sensor Location

The load sensor measures the reticle chuck X-position when loading a reticle.

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