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MAH (Make Up Air Handler) : Figure #2

The document shows a diagram of a clean room layout with a raised floor return. It depicts a make-up air handler and recirculation air handler supplying HEPA-filtered air to a process bay through a mixing plenum, with the air then being exhausted through vacuum pumps after passing through the service chase and process bay. The design uses a unidirectional airflow approach with outlets on the ceiling and exhaust inlets near the floor to provide downward clean air movement through the working zones to the contaminated floor area.

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88 views1 page

MAH (Make Up Air Handler) : Figure #2

The document shows a diagram of a clean room layout with a raised floor return. It depicts a make-up air handler and recirculation air handler supplying HEPA-filtered air to a process bay through a mixing plenum, with the air then being exhausted through vacuum pumps after passing through the service chase and process bay. The design uses a unidirectional airflow approach with outlets on the ceiling and exhaust inlets near the floor to provide downward clean air movement through the working zones to the contaminated floor area.

Uploaded by

CIVIL
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
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www.PDHcenter.com PDH Course M143 www.PDHonline.

org

MAH(Make up
Air Handler)

RAH (Recirc
RAH
Air Handler)
Mixing
Plenum

HEPA FILTERS HEPA FILTERS

Process Process
Bay Bay
Service
Chase

Vacuum
Pump

Figure #2 (Clean room Arrangements with Raised Floor Return)

The figure # 2 above shows Class 10, Unidirectional Air Flow Arrangement. The figure

depicts raised floor return arrangement unlike the low wall return arrangement shown in

figure# 1.

Why Raised Floor or low wall returns?

Typically in a clean room, outlets supplying air to sensitive ultra clean areas and highly

contaminated areas should be located on the ceiling, with perimeter or several exhaust inlets

near the floor. This arrangement provides a downward movement of clean air through the

working zones to the contaminated floor area for exhaust.

The clean room design follows the 180° unidirectional airflow approach. By 180°, it implies

that either

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