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Clean Rooms - Semiconductor Manufacturing

This document discusses design considerations for rooms housing patients with infectious diseases like HIV/AIDS and tuberculosis (TB). It notes that HIV rooms and TB rooms have similar design criteria, with UVGI systems and HEPA filters sometimes used together. For patients with both HIV/AIDS and TB, one solution is to place the positive pressure HIV room within the negative pressure TB room, or vice versa, creating nested isolation rooms. It also describes the four biohazard levels for laboratories, from simple isolated areas to near-perfectly airtight zones. Specific design information is available from sources like ANSI and ASHRAE.

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296 views1 page

Clean Rooms - Semiconductor Manufacturing

This document discusses design considerations for rooms housing patients with infectious diseases like HIV/AIDS and tuberculosis (TB). It notes that HIV rooms and TB rooms have similar design criteria, with UVGI systems and HEPA filters sometimes used together. For patients with both HIV/AIDS and TB, one solution is to place the positive pressure HIV room within the negative pressure TB room, or vice versa, creating nested isolation rooms. It also describes the four biohazard levels for laboratories, from simple isolated areas to near-perfectly airtight zones. Specific design information is available from sources like ANSI and ASHRAE.

Uploaded by

CIVIL
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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www.PDHcenter.com PDH Course M143 www.PDHonline.

org

people. Design criteria for HIV Rooms are similar to those for TB Rooms. UVGI systems are

sometimes used in conjunction with HEPA filters.

What if the AIDS patient is also suffering from TB? This presents a unique design problem.

One solution is to house the positive pressure (HIV) room within a negative pressure (TB)

room, or vice-versa, which would be similar to a pair of nested biohazard levels.

3) Biohazard laboratories are merely isolation rooms with strict requirements defining their

degree of air tightness, pressurization and associated equipment. There are four biohazard

levels, in level 1 defines a simple isolated area, and in which level 4 defines a near perfectly

airtight zone requiring breathing apparatus and airtight anterooms or staging areas. Specific

information on laboratory design is widely available from various sources, including ANSI and

ASHRAE.

For further reading refer to American Institute of Architects 1996-97 Guidelines for Design and

Construction of Hospital and Health Care Facilities,

Chapter 7; Health care facilities, ASHRAE handbook, HVAC applications, 1995

Guidelines published by Centers for Disease Control and Prevention (CDC)

3
Clean Rooms - Semiconductor Manufacturing
The production of microelectronic semiconductor products requires a facility that is

environmentally controlled and virtually free from contaminants. Most microelectronic

manufacturing requires Clean Room Class 100 or cleaner. A deposited particle having a diameter

of 10% of the circuit is likely to result in a circuit failure. With circuit line widths of 0.25 microns,

particles of 0.025 microns are a concern. Air ionization technology is sometimes used in addition

to HEPA filter particle control.

Common design practices in existing facilities:

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