Scribd
Upload
70 views8 pages

Wafer Dimension Specifications

The document provides detailed specifications for various wafer sizes ranging from 2-inch to 12-inch, including dimensions for diameter, thickness, and flat lengths. Each wafer size includes tolerances and specific flat locations, with additional details for primary and secondary flats. The document also includes approval and revision information for manufacturing purposes.

Uploaded by

Velmurugan
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
70 views8 pages

Wafer Dimension Specifications

The document provides detailed specifications for various wafer sizes ranging from 2-inch to 12-inch, including dimensions for diameter, thickness, and flat lengths. Each wafer size includes tolerances and specific flat locations, with additional details for primary and secondary flats. The document also includes approval and revision information for manufacturing purposes.

Uploaded by

Velmurugan
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
You are on page 1/ 8

WAFER DIMENSIONS

2 ~ 12 Inch
2-Inch 3-Inch
Wafer Size 100mm 125mm 150mm 200mm 300mm
50.8mm 76.2mm

2.000" 0.015" 3.000" 0.025"


Diameter 50.8mm 0.38mm 76.2mm 0.63mm 100mm 0.5mm 125mm 0.5mm 150mm 0.2mm 200mm 0.2mm 300mm 0.2mm

0.011" 0.001" 675μm 20μm


Thickness 0.015" 0.001" 525μm 20μm 625μm 20μm or 725μm 20μm 775μm 20μm
279μm 25μm 381μm 25μm 625μm 15μm

Primary Flat 0.625" 0.065" 0.875" 0.125" 32.5mm 2.5mm 42.5mm 2.5mm 57.5mm 2.5mm Notch Notch
Length 15.88mm 1.65mm 22.22mm 3.17mm

Secondary Flat 0.315" 0.065" 0.44" 0.06"


Length 18mm 2.0mm 27.5mm 2.5mm 37.5mm 2.5mm NA NA
8mm 1.65mm 11.18mm 1.52mm

90 5 clockwise from primary flat


Secondary Flat
Location
45 5 clockwise from primary flat NA NA
180 5 clockwise from primary flat

Secondary Flat
Secondary
Flat
90°
45° Primary Primary Primary Primary
Flat Flat flat Flat
180°
Secondary
flat
1.0±0.25

200mm 3.0 90°


APPROVALS DATE
300mm
DRAWN T.Au 12/11/2019

ENG M. Hart 12/11/2019 TITLE


WAFER DIMENSIONS
MFG

2.3 MAX QA SCALE SIZE DRAWING NO. REV

CUST 1:5 A 174001 A


3.05 MIN
REVISED DO NOT SCALE DRAWING SHEET 1 OF 8
WAFER DIMENSIONS
2-Inch (50.8mm)

2-Inch
Wafer Size 50.8mm

2.000" 0.015"
Diameter 50.8mm 0.38mm

0.011" 0.001"
Thickness
279μm 25μm

Primary Flat 0.625" 0.065"


Length 15.88mm 1.65mm

Secondary Flat 0.315" 0.065"


Length 8mm 1.65mm

90 5 clockwise from primary flat


Secondary Flat 45 5 clockwise from primary flat
Location
180 5 clockwise from primary flat

Secondary Flat
Secondary
Flat
90°
45°
Primary Primary Primary Primary
Flat Flat Flat Flat

180°

Secondary
Flat
STANDARD

TITLE WAFER DIMENSIONS


2-inch (50.8mm)
SCALE SIZE DRAWING NO. REV

2:3 A 174002 A
DO NOT SCALE DRAWING SHEET 2 OF 8
WAFER DIMENSIONS
3-Inch (76.2mm)

3-Inch
Wafer Size 76.2mm

3.000" 0.025"
Diameter 76.2mm 0.63mm

0.015" 0.001"
Thickness
381μm 25μm

Primary Flat 0.875" 0.125"


Length 22.22mm 3.17mm

Secondary Flat 0.44" 0.06"


Length 11.18mm 1.52mm

90 5 clockwise from primary flat


Secondary Flat 45 5 clockwise from primary flat
Location
180 5 clockwise from primary flat

Secondary Flat

Secondary
Flat
90°
45°
Primary Primary Primary Primary
Flat Flat Flat Flat

180°
Secondary
Flat
STANDARD

TITLE WAFER DIMENSIONS


3-inch (76.2mm)
SCALE SIZE DRAWING NO. REV

1:2 A 174003 A
DO NOT SCALE DRAWING SHEET 3 OF 8
WAFER DIMENSIONS
100mm (4-inch)

Wafer Size 100mm

Diameter 100mm 0.5mm

525μm 20μm
Thickness or
625μm 20μm

Primary Flat 32.5mm 2.5mm


Length

Secondary Flat 18mm 2.0mm


Length

90 5 clockwise from primary flat


Secondary Flat 45 5 clockwise from primary flat
Location
180 5 clockwise from primary flat

Secondary Flat

Secondary
flat 90°
Primary 45° Primary Primary Primary
Flat flat Flat Flat

180°
Secondary
STANDARD Flat

TITLE WAFER DIMENSIONS


100mm (4-inch)
SCALE SIZE DRAWING NO. REV

1:3 A 174004 A
DO NOT SCALE DRAWING SHEET 4 OF 8
WAFER DIMENSIONS
125mm (5-inch)

Wafer Size 125mm

Diameter 125mm 0.5mm

Thickness 625μm 20μm

Primary Flat 42.5mm 2.5mm


Length

Secondary Flat 27.5mm 2.5mm


Length

90 5 clockwise from primary flat


Secondary Flat 45 5 clockwise from primary flat
Location
180 5 clockwise from primary flat

Secondary Flat
Secondary
Flat
90°
45°
Primary Primary Primary Primary
Flat Flat Flat Flat

180°

STANDARD Secondary
Flat

TITLE WAFER DIMENSIONS


125mm (5-inch)
SCALE SIZE DRAWING NO. REV

1:3 A 174005 A
DO NOT SCALE DRAWING SHEET 5 OF 8
WAFER DIMENSIONS
150mm (6-inch)

Wafer Size 150mm

Diameter 150mm 0.2mm

675μm 20μm
Thickness or
625μm 15μm

Primary Flat 57.5mm 2.5mm


Length

Secondary Flat 37.5mm 2.5mm


Length

90 5 clockwise from primary flat


Secondary Flat 45 5 clockwise from primary flat
Location
180 5 clockwise from primary flat

Secondary Flat
Secondary
flat
90°
45°
Primary Primary Primary Primary
Flat flat Flat Flat

180°

Secondary
STANDARD Flat

TITLE WAFER DIMENSIONS


150mm (6-inch)
SCALE SIZE DRAWING NO. REV

1:4 A 174006 A
DO NOT SCALE DRAWING SHEET 6 OF 8
WAFER DIMENSIONS
200mm (8-inch)

Wafer Size 200mm

Diameter 200mm 0.2mm

Thickness 725μm 20μm

Primary Flat Notch


Length

Secondary Flat NA
Length

1.0±0.25

NOTCH
DETAIL 3.0 90°
200mm

TITLE WAFER DIMENSIONS


200mm (8-inch)
2.3 MAX
SCALE SIZE DRAWING NO. REV

1:3 A 174008 A
3.05 MIN
DO NOT SCALE DRAWING SHEET 7 OF 8
WAFER DIMENSIONS
300mm (12-inch)

Wafer Size 300mm

Diameter 300mm 0.2mm

Thickness 775μm 20μm

Primary Flat Notch


Length

Secondary Flat NA
Length

1.0±0.25

NOTCH
DETAIL 3.0
300mm 90°

TITLE WAFER DIMENSIONS


300mm (12-inch)
2.3 MAX
SCALE SIZE DRAWING NO. REV

1:4 A 174012 A
3.05 MIN
DO NOT SCALE DRAWING SHEET 8 OF 8

You might also like