Lightweight MEMS structural analysis tools (pre-FEM)

mems-ana is a lightweight toolkit for pre-FEM shape sanity checks of MEMS structures,
focused on d33-dominant piezoelectric (PZT) actuation.

This page is a visual entry point.
For design intent and assumptions, see the repository README.

Language	GitHub Pages 🌐	GitHub 💻
🇺🇸 English

• 📈 Out-of-plane displacement uz(x, y)
• ⚡ d33-dominant actuation with simplified ferroelectric hysteresis
• 🔌 Voltage-driven analysis only
  • Current I is NOT modeled
• 📐 Absolute displacement visualization
  (offset at 0 V is allowed)

This is not FEM.
It is used before FEM to check shape, symmetry, and trend consistency.

d33-dominant uz(x, y), 10 voltage cycles

• ➕ positive-only uz
• 🎨 color / z-range fixed: 0–500 nm
• 📏 geometric aspect ratio preserved
• 🔁 rising / falling branches included

Representative static results from the same model assumptions.

• Constitutive relation (simplified):
  • S(E) = d33 * (P/Pm) * Ez + Q * P(Ez)^2
  • uz ≈ S(E) * t_pzt
• 🔄 P(E) includes up/down branches (hysteresis)
• 📐 Absolute displacement is used (no zero-shift correction)
• 🎯 This model prioritizes shape consistency, not material accuracy

All figures and animations shown here come from:

mems-ana_demo/

This directory is intentionally frozen:

• 🔒 no refactor
• 🔒 no dependency update
• 📌 used as a reproducible reference snapshot

🔗 GitHub Pages
/mems-ana_demo/

🔗 GitHub (source)
/mems-ana_demo

For design-oriented analysis (not visualization),
this project provides a calibrated Reduced Order Model (ROM).

• 🧱 Plate + piezo unimorph ROM
• 📊 Pre-FEM frequency response and displacement analysis
• 🧪 Shape factor K_W calibrated and contract-tested with pytest

🔗 GitHub Pages
/mems-ana_core/

🔗 GitHub (source)
/mems-ana_core

📌 Item	Details
Name	Shinichi Samizo
Expertise	Semiconductor devices (logic, memory, high-voltage mixed-signal) Thin-film piezo actuators for inkjet systems Printhead productization, BOM management, ISO training
GitHub

Suggestions, improvements, and discussions are welcome via GitHub Discussions.